Joseph F. AUBUCHON

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
PEALD nitride films
- Patent number 12,119,221
- Issue date Oct 15, 2024
- Applied Materials, Inc.
- Hanhong Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dithering or dynamic offsets for improved uniformity
- Patent number 12,077,861
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Joseph AuBuchon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition apparatus and methods using staggered pumping locations
- Patent number 12,060,638
- Issue date Aug 13, 2024
- Applied Materials, Inc.
- Joseph AuBuchon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming metal nitride films
- Patent number 11,978,625
- Issue date May 7, 2024
- Applied Materials, Inc.
- Joseph AuBuchon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual-function wafer backside pressure control and edge purge
- Patent number 11,923,233
- Issue date Mar 5, 2024
- Applied Materials, Inc.
- Joseph AuBuchon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Single wafer processing environments with spatial separation
- Patent number 11,894,257
- Issue date Feb 6, 2024
- Applied Materials, Inc.
- Michael Rice
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PEALD titanium nitride with direct microwave plasma
- Patent number 11,823,870
- Issue date Nov 21, 2023
- Applied Materials, Inc.
- Hanhong Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition radial and edge profile tunability through independent c...
- Patent number 11,791,136
- Issue date Oct 17, 2023
- Applied Materials, Inc.
- Sanjeev Baluja
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for controlling a flow pulse shape
- Patent number 11,761,083
- Issue date Sep 19, 2023
- Applied Materials, Inc.
- Joseph AuBuchon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for improving chemical utilization rate in de...
- Patent number 11,713,508
- Issue date Aug 1, 2023
- Applied Materials, Inc.
- Kevin Griffin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Modular microwave source with embedded ground surface
- Patent number 11,670,489
- Issue date Jun 6, 2023
- Applied Materials, Inc.
- Joseph F. AuBuchon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
PEALD nitride films
- Patent number 11,626,281
- Issue date Apr 11, 2023
- Applied Materials, Inc.
- Hanhong Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermally uniform deposition station
- Patent number 11,584,993
- Issue date Feb 21, 2023
- Applied Materials, Inc.
- Jared Ahmad Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Machine learning based smart process recipe builder to improve azim...
- Patent number 11,586,789
- Issue date Feb 21, 2023
- Applied Materials, Inc.
- Dhritiman Subha Kashyap
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Gas distribution plate for thermal deposition
- Patent number 11,583,816
- Issue date Feb 21, 2023
- Applied Materials, Inc.
- Jared Ahmad Lee
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Precursor delivery system
- Patent number 11,560,624
- Issue date Jan 24, 2023
- Applied Materials, Inc.
- Joseph AuBuchon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas-pulsing-based shared precursor distribution system and methods...
- Patent number 11,520,358
- Issue date Dec 6, 2022
- Applied Materials, Inc.
- Michael Rice
- G01 - MEASURING TESTING
Information Patent Grant
Spatial wafer processing with improved temperature uniformity
- Patent number 11,479,855
- Issue date Oct 25, 2022
- Applied Materials, Inc.
- Joseph AuBuchon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and methods for improving chemical utilization rate in de...
- Patent number 11,396,703
- Issue date Jul 26, 2022
- Applied Materials, Inc.
- Kevin Griffin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Complementary pattern station designs
- Patent number 11,220,747
- Issue date Jan 11, 2022
- Applied Materials, Inc.
- Joseph AuBuchon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas-pulsing-based shared precursor distribution system and methods...
- Patent number 11,169,547
- Issue date Nov 9, 2021
- Applied Materials, Inc.
- Michael Rice
- G01 - MEASURING TESTING
Information Patent Grant
Gas distribution plate for thermal deposition
- Patent number 11,110,425
- Issue date Sep 7, 2021
- Applied Materials, Inc.
- Jared Ahmad Lee
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Modular microwave source with embedded ground surface
- Patent number 11,049,694
- Issue date Jun 29, 2021
- Applied Materials, Inc.
- Joseph F. AuBuchon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition radial and edge profile tunability through independent c...
- Patent number 11,017,986
- Issue date May 25, 2021
- Applied Materials, Inc.
- Sanjeev Baluja
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Spatial wafer processing with improved temperature uniformity
- Patent number 10,787,739
- Issue date Sep 29, 2020
- Applied Materials, Inc.
- Joseph AuBuchon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnet configurations for radial uniformity tuning of ICP plasmas
- Patent number 10,249,479
- Issue date Apr 2, 2019
- Applied Materials, Inc.
- Joseph F. Aubuchon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for controlling a magnetic field in a plasma c...
- Patent number 10,115,566
- Issue date Oct 30, 2018
- Applied Materials, Inc.
- Steven Lane
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electromagnetic dipole for plasma density tuning in a substrate pro...
- Patent number 9,779,953
- Issue date Oct 3, 2017
- Applied Materials, Inc.
- Joseph F. Aubuchon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for selective coil excitation in inductively coup...
- Patent number 9,659,751
- Issue date May 23, 2017
- Applied Materials, Inc.
- Kartik Ramaswamy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for controlling a magnetic field in a plasma c...
- Patent number 9,613,783
- Issue date Apr 4, 2017
- Applied Materials, Inc.
- Steven Lane
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
DEPOSITION APPARATUS AND METHODS USING STAGGERED PUMPING LOCATIONS
- Publication number 20240360553
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Joseph AuBuchon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DITHERING OR DYNAMIC OFFSETS FOR IMPROVED UNIFORMITY
- Publication number 20240352586
- Publication date Oct 24, 2024
- Applied Materials, Inc.
- Joseph AuBuchon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SINGLE WAFER PROCESSING ENVIRONMENTS WITH SPATIAL SEPARATION
- Publication number 20240096688
- Publication date Mar 21, 2024
- Applied Materials, Inc.
- Michael Robert Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR CONTROLLING PULSE SHAPE IN ALD PROCESSES
- Publication number 20230366088
- Publication date Nov 16, 2023
- Applied Materials, Inc.
- Joseph AuBuchon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PEALD TITANIUM NITRIDE WITH DIRECT MICROWAVE PLASMA
- Publication number 20230253186
- Publication date Aug 10, 2023
- Applied Materials, Inc.
- Hanhong Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PEALD Nitride Films
- Publication number 20230230830
- Publication date Jul 20, 2023
- Applied Materials, Inc.
- Hanhong Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods Of Forming Metal Nitride Films
- Publication number 20230123038
- Publication date Apr 20, 2023
- Applied Materials, Inc.
- Joseph AuBuchon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD PUMPING GEOMETRY FOR PRECURSOR CONTAINMENT
- Publication number 20230008986
- Publication date Jan 12, 2023
- Applied Materials, Inc.
- Prahallad Iyengar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus For Single Chamber Deposition And Etch
- Publication number 20220389571
- Publication date Dec 8, 2022
- Applied Materials, Inc.
- Joseph AuBuchon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NON-CONFORMAL PLASMA INDUCED ALD GAPFILL
- Publication number 20220389580
- Publication date Dec 8, 2022
- Applied Materials, Inc.
- Hanhong Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MACHINE LEARNING BASED SMART PROCESS RECIPE BUILDER TO IMPROVE AZIM...
- Publication number 20220327262
- Publication date Oct 13, 2022
- Applied Materials, Inc.
- Dhritiman Subha Kashyap
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Apparatus and Methods for Improving Chemical Utilization Rate in De...
- Publication number 20220316061
- Publication date Oct 6, 2022
- Applied Materials, Inc.
- Kevin Griffin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and Methods for Improving Chemical Utilization Rate in De...
- Publication number 20220195600
- Publication date Jun 23, 2022
- Applied Materials, Inc.
- Kevin Griffin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Deposition Apparatus and Methods Using Staggered Pumping Locations
- Publication number 20220186367
- Publication date Jun 16, 2022
- Applied Materials, Inc.
- Joseph AuBuchon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMALLY UNIFORM DEPOSITION STATION
- Publication number 20220119948
- Publication date Apr 21, 2022
- Applied Materials, Inc.
- Jared Ahmad Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Gas-Pulsing-Based Shared Precursor Distribution System And Methods...
- Publication number 20220075396
- Publication date Mar 10, 2022
- Applied Materials, Inc.
- Michael Rice
- G01 - MEASURING TESTING
Information Patent Application
GAS DISTRIBUTION PLATE FOR THERMAL DEPOSITION
- Publication number 20210394144
- Publication date Dec 23, 2021
- Applied Materials, Inc.
- Jared Ahmad Lee
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
MODULAR MICROWAVE SOURCE WITH EMBEDDED GROUND SURFACE
- Publication number 20210313153
- Publication date Oct 7, 2021
- Applied Materials, Inc.
- Joseph F. AuBuchon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEQUENTIAL PULSE AND PURGE FOR ALD PROCESSES
- Publication number 20210262092
- Publication date Aug 26, 2021
- Applied Materials, Inc.
- Muhammad M. Rasheed
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION RADIAL AND EDGE PROFILE TUNABILITY THROUGH INDEPENDENT C...
- Publication number 20210249230
- Publication date Aug 12, 2021
- Applied Materials, Inc.
- Sanjeev BALUJA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULAR MICROWAVE SOURCE WITH EMBEDDED GROUND SURFACE
- Publication number 20210098236
- Publication date Apr 1, 2021
- Applied Materials, Inc.
- Joseph F. AuBuchon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PEALD Nitride Films
- Publication number 20210090877
- Publication date Mar 25, 2021
- Applied Materials, Inc.
- Hanhong Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods for Controlling Pulse Shape in ALD Processes
- Publication number 20210087688
- Publication date Mar 25, 2021
- Applied Materials, Inc.
- Joseph AuBuchon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dithering Or Dynamic Offsets For Improved Uniformity
- Publication number 20210087681
- Publication date Mar 25, 2021
- Applied Materials, Inc.
- Joseph AuBuchon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PEALD TITANIUM NITRIDE WITH DIRECT MICROWAVE PLASMA
- Publication number 20210050186
- Publication date Feb 18, 2021
- Applied Materials, Inc.
- Hanhong Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DUAL-FUNCTION WAFER BACKSIDE PRESSURE CONTROL AND EDGE PURGE
- Publication number 20200411359
- Publication date Dec 31, 2020
- Applied Materials, Inc.
- Joseph AuBuchon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Spatial Wafer Processing With Improved Temperature Uniformity
- Publication number 20200392621
- Publication date Dec 17, 2020
- Applied Materials, Inc.
- Joseph AuBuchon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vacuum Pumps For Single And Multi-Process Chamber Flow Stream Sharing
- Publication number 20200256228
- Publication date Aug 13, 2020
- Applied Materials, Inc.
- Michael Rice
- F01 - MACHINES OR ENGINES IN GENERAL ENGINE PLANTS IN GENERAL STEAM ENGINES
Information Patent Application
Complementary Pattern Station Designs
- Publication number 20200131636
- Publication date Apr 30, 2020
- Applied Materials, Inc.
- Joseph AuBuchon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Spatial Wafer Processing With Improved Temperature Uniformity
- Publication number 20200131635
- Publication date Apr 30, 2020
- Applied Materials, Inc.
- Joseph AuBuchon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Joseph F. AUBUCHON

Person

Patents Grantslast 30 patents

PEALD nitride films

Dithering or dynamic offsets for improved uniformity

Deposition apparatus and methods using staggered pumping locations

Methods of forming metal nitride films

Dual-function wafer backside pressure control and edge purge

Single wafer processing environments with spatial separation

PEALD titanium nitride with direct microwave plasma

Deposition radial and edge profile tunability through independent c...

Methods for controlling a flow pulse shape

Apparatus and methods for improving chemical utilization rate in de...

Modular microwave source with embedded ground surface

PEALD nitride films

Thermally uniform deposition station

Machine learning based smart process recipe builder to improve azim...

Gas distribution plate for thermal deposition

Precursor delivery system

Gas-pulsing-based shared precursor distribution system and methods...

Spatial wafer processing with improved temperature uniformity

Apparatus and methods for improving chemical utilization rate in de...

Complementary pattern station designs

Gas-pulsing-based shared precursor distribution system and methods...

Gas distribution plate for thermal deposition

Modular microwave source with embedded ground surface

Deposition radial and edge profile tunability through independent c...

Spatial wafer processing with improved temperature uniformity

Magnet configurations for radial uniformity tuning of ICP plasmas

Method and apparatus for controlling a magnetic field in a plasma c...

Electromagnetic dipole for plasma density tuning in a substrate pro...

System and method for selective coil excitation in inductively coup...

Method and apparatus for controlling a magnetic field in a plasma c...

Patents Applicationslast 30 patents

DEPOSITION APPARATUS AND METHODS USING STAGGERED PUMPING LOCATIONS

DITHERING OR DYNAMIC OFFSETS FOR IMPROVED UNIFORMITY

SINGLE WAFER PROCESSING ENVIRONMENTS WITH SPATIAL SEPARATION

METHODS FOR CONTROLLING PULSE SHAPE IN ALD PROCESSES

PEALD TITANIUM NITRIDE WITH DIRECT MICROWAVE PLASMA

PEALD Nitride Films

Methods Of Forming Metal Nitride Films

SHOWERHEAD PUMPING GEOMETRY FOR PRECURSOR CONTAINMENT

Apparatus For Single Chamber Deposition And Etch

NON-CONFORMAL PLASMA INDUCED ALD GAPFILL

MACHINE LEARNING BASED SMART PROCESS RECIPE BUILDER TO IMPROVE AZIM...

Apparatus and Methods for Improving Chemical Utilization Rate in De...

Apparatus and Methods for Improving Chemical Utilization Rate in De...

Deposition Apparatus and Methods Using Staggered Pumping Locations

THERMALLY UNIFORM DEPOSITION STATION

Gas-Pulsing-Based Shared Precursor Distribution System And Methods...

GAS DISTRIBUTION PLATE FOR THERMAL DEPOSITION

MODULAR MICROWAVE SOURCE WITH EMBEDDED GROUND SURFACE

SEQUENTIAL PULSE AND PURGE FOR ALD PROCESSES

DEPOSITION RADIAL AND EDGE PROFILE TUNABILITY THROUGH INDEPENDENT C...

MODULAR MICROWAVE SOURCE WITH EMBEDDED GROUND SURFACE

PEALD Nitride Films

Methods for Controlling Pulse Shape in ALD Processes

Dithering Or Dynamic Offsets For Improved Uniformity

PEALD TITANIUM NITRIDE WITH DIRECT MICROWAVE PLASMA

DUAL-FUNCTION WAFER BACKSIDE PRESSURE CONTROL AND EDGE PURGE

Spatial Wafer Processing With Improved Temperature Uniformity

Vacuum Pumps For Single And Multi-Process Chamber Flow Stream Sharing

Complementary Pattern Station Designs

Spatial Wafer Processing With Improved Temperature Uniformity