Joseph Ferrara

Person

Georgetown, MD, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method for decreasing cool down time with heated system for semicon...
- Patent number 11,728,187
- Issue date Aug 15, 2023
- Axcelis Technologies, Inc.
- John Baggett
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High power wafer cooling
- Patent number 11,670,483
- Issue date Jun 6, 2023
- Axcelis Technologies, Inc.
- Joseph Ferrara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High throughput serial wafer handling end station
- Patent number 10,832,926
- Issue date Nov 10, 2020
- Axcelis Technologies, Inc.
- Joseph Ferrara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integrated emissivity sensor alignment characterization
- Patent number 10,041,789
- Issue date Aug 7, 2018
- Axcelis Technologies, Inc.
- John F. Baggett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High throughput cooled ion implantation system and method
- Patent number 9,607,803
- Issue date Mar 28, 2017
- Axcelis Technologies, Inc.
- Armin Huseinovic
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High throughput heated ion implantation system and method
- Patent number 9,378,992
- Issue date Jun 28, 2016
- Axcelis Technologies, Inc.
- Armin Huseinovic
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High throughput wafer notch aligner
- Patent number 7,949,425
- Issue date May 24, 2011
- Axcelis Technologies, Inc.
- Robert J. Mitchell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for two-dimensional beam scan across a workpiece...
- Patent number 7,750,320
- Issue date Jul 6, 2010
- Axcelis Technologies, Inc.
- Joseph Ferrara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Work-piece processing system
- Patent number 7,699,574
- Issue date Apr 20, 2010
- Axcelis Technologies, Inc.
- Joseph Ferrara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ribbon beam ion implanter cluster tool
- Patent number 7,375,355
- Issue date May 20, 2008
- Axcelis Technologies, Inc.
- Joseph Ferrara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for scanning a workpiece in a vacuum chamber o...
- Patent number 7,276,712
- Issue date Oct 2, 2007
- Axcelis Technologies, Inc.
- Joseph Ferrara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Work-piece processing system
- Patent number 7,246,985
- Issue date Jul 24, 2007
- Axcelis Technologies, Inc.
- Joseph Ferrara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer 2D scan mechanism
- Patent number 7,112,808
- Issue date Sep 26, 2006
- Axcelis Technologies, Inc.
- Michael Ioannou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning systems and methods for providing ions from an ion beam to...
- Patent number 6,992,310
- Issue date Jan 31, 2006
- Axcelis Technologies, Inc.
- Joseph Ferrara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam measurement systems and methods for ion implant dose and u...
- Patent number 6,992,309
- Issue date Jan 31, 2006
- Axcelis Technologies, Inc.
- Klaus Petry
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Adjustable implantation angle workpiece support structure for an io...
- Patent number 6,900,444
- Issue date May 31, 2005
- Axcelis Technologies, Inc.
- Joseph Ferrara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Adjustable implantation angle workpiece support structure for an io...
- Patent number 6,774,373
- Issue date Aug 10, 2004
- Axcelis Technologies, Inc.
- Joseph Ferrara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Adjustable implantation angle workpiece support structure for an io...
- Patent number 6,710,360
- Issue date Mar 23, 2004
- Axcelis Technologies, Inc.
- Joseph Ferrara
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ACTIVE WORKPIECE HEATING OR COOLING FOR AN ION IMPLANTATION SYSTEM
- Publication number 20210366746
- Publication date Nov 25, 2021
- Axcelis Technologies, Inc.
- Joseph Ferrara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH POWER WAFER COOLING
- Publication number 20200350139
- Publication date Nov 5, 2020
- Axcelis Technologies, Inc.
- Joseph Ferrara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR DECREASING COOL DOWN TIME WITH HEATED SYSTEM FOR SEMICON...
- Publication number 20200203196
- Publication date Jun 25, 2020
- Axcelis Technologies, Inc.
- John Baggett
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ACTIVE WORKPIECE HEATING OR COOLING FOR AN ION IMPLANTATION SYSTEM
- Publication number 20180197761
- Publication date Jul 12, 2018
- Axcelis Technologies, Inc.
- Joseph Ferrara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED EMISSIVITY SENSOR ALIGNMENT CHARACTERIZATION
- Publication number 20180094921
- Publication date Apr 5, 2018
- Axcelis Technologies, Inc.
- John F. Baggett
- G01 - MEASURING TESTING
Information Patent Application
HIGH THROUGHPUT SERIAL WAFER HANDLING END STATION
- Publication number 20170178933
- Publication date Jun 22, 2017
- Axcelis Technologies, Inc.
- Joseph Ferrara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH THROUGHPUT COOLED ION IMPLANTATION SYSTEM AND METHOD
- Publication number 20170040141
- Publication date Feb 9, 2017
- Axcelis Technologies, Inc.
- Armin Huseinovic
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH THROUGHPUT HEATED ION IMPLANTATION SYSTEM AND METHOD
- Publication number 20150380285
- Publication date Dec 31, 2015
- Axcelis Technologies, Inc.
- Armin Huseinovic
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and method for two-dimensional beam scan across a workpiece...
- Publication number 20080149857
- Publication date Jun 26, 2008
- Axcelis Technologies, Inc.
- Joseph Ferrara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High throughput serial wafer handling end station
- Publication number 20080138178
- Publication date Jun 12, 2008
- Axcelis Technologies,Inc.
- Joseph Ferrara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High throughput wafer notch aligner
- Publication number 20080138175
- Publication date Jun 12, 2008
- Axcelis Technologies, Inc.
- Robert J. Mitchell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ribbon beam ion implanter cluster tool
- Publication number 20070262271
- Publication date Nov 15, 2007
- Axcelis Technologies, Inc.
- Joseph Ferrara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WORK-PIECE PROCESSING SYSTEM
- Publication number 20070243049
- Publication date Oct 18, 2007
- Axcelis Technologies, Inc.
- Joseph Ferrara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for scanning a workpiece in a vacuum chamber o...
- Publication number 20070001129
- Publication date Jan 4, 2007
- Axcelis Technologies, Inc.
- Joseph Ferrara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM MEASUREMENT SYSTEMS AND METHODS FOR ION IMPLANT DOSE AND U...
- Publication number 20060033045
- Publication date Feb 16, 2006
- Klaus Petry
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING SYSTEMS AND METHODS FOR PROVIDING IONS FROM AN ION BEAM TO...
- Publication number 20060033046
- Publication date Feb 16, 2006
- Joseph Ferrara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Magnet for scanning ion beams
- Publication number 20060017010
- Publication date Jan 26, 2006
- Axcelis Technologies, Inc.
- Bo H. Vanderberg
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
Work-piece processing system
- Publication number 20050232727
- Publication date Oct 20, 2005
- Axcelis Technologies, Inc.
- Joseph Ferrara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer 2D scan mechanism
- Publication number 20050184253
- Publication date Aug 25, 2005
- Michael Ioannou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Adjustable implantation angle workpiece support structure for an io...
- Publication number 20040222390
- Publication date Nov 11, 2004
- Axcelis Technologies, Inc.
- Joseph Ferrara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Adjustable implantation angle workpiece support structure for an io...
- Publication number 20040021092
- Publication date Feb 5, 2004
- Axcelis Technologies, Inc.
- Joseph Ferrara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADJUSTABLE IMPLANTATION ANGLE WORKPIECE SUPPORT STRUCTURE FOR AN IO...
- Publication number 20040007678
- Publication date Jan 15, 2004
- Axcelis Technologies, Inc.
- Joseph Ferrara
- H01 - BASIC ELECTRIC ELEMENTS

Joseph Ferrara

Person

Patents Grantslast 30 patents

Method for decreasing cool down time with heated system for semicon...

High power wafer cooling

High throughput serial wafer handling end station

Integrated emissivity sensor alignment characterization

High throughput cooled ion implantation system and method

High throughput heated ion implantation system and method

High throughput wafer notch aligner

System and method for two-dimensional beam scan across a workpiece...

Work-piece processing system

Ribbon beam ion implanter cluster tool

Method and apparatus for scanning a workpiece in a vacuum chamber o...

Work-piece processing system

Wafer 2D scan mechanism

Scanning systems and methods for providing ions from an ion beam to...

Ion beam measurement systems and methods for ion implant dose and u...

Adjustable implantation angle workpiece support structure for an io...

Adjustable implantation angle workpiece support structure for an io...

Adjustable implantation angle workpiece support structure for an io...

Patents Applicationslast 30 patents

ACTIVE WORKPIECE HEATING OR COOLING FOR AN ION IMPLANTATION SYSTEM

HIGH POWER WAFER COOLING

METHOD FOR DECREASING COOL DOWN TIME WITH HEATED SYSTEM FOR SEMICON...

ACTIVE WORKPIECE HEATING OR COOLING FOR AN ION IMPLANTATION SYSTEM

INTEGRATED EMISSIVITY SENSOR ALIGNMENT CHARACTERIZATION

HIGH THROUGHPUT SERIAL WAFER HANDLING END STATION

HIGH THROUGHPUT COOLED ION IMPLANTATION SYSTEM AND METHOD

HIGH THROUGHPUT HEATED ION IMPLANTATION SYSTEM AND METHOD

System and method for two-dimensional beam scan across a workpiece...

High throughput serial wafer handling end station

High throughput wafer notch aligner

Ribbon beam ion implanter cluster tool

WORK-PIECE PROCESSING SYSTEM

Method and apparatus for scanning a workpiece in a vacuum chamber o...

ION BEAM MEASUREMENT SYSTEMS AND METHODS FOR ION IMPLANT DOSE AND U...

SCANNING SYSTEMS AND METHODS FOR PROVIDING IONS FROM AN ION BEAM TO...

Magnet for scanning ion beams

Work-piece processing system

Wafer 2D scan mechanism

Adjustable implantation angle workpiece support structure for an io...

Adjustable implantation angle workpiece support structure for an io...

ADJUSTABLE IMPLANTATION ANGLE WORKPIECE SUPPORT STRUCTURE FOR AN IO...