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Joseph Fleming Walsh
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Soquel, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Vacuum actuator containment for molecular contaminant and particle...
Patent number
11,156,926
Issue date
Oct 26, 2021
KLA Corporation
Zefram D. Marks
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Spectral purity filters (SPF), support structures for SPF films and...
Patent number
9,891,356
Issue date
Feb 13, 2018
KLA-Tencor Corporation
Joseph Walsh
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus and methods for reticle handling in an EUV reticle inspec...
Patent number
9,851,643
Issue date
Dec 26, 2017
KLA-Tencor Corporation
Francis Charles Chilese
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Grant
System and method for generation of extreme ultraviolet light
Patent number
9,544,984
Issue date
Jan 10, 2017
KLA-Tencor Corporation
Alexander Bykanov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
CORRECTING ABERRATION AND APODIZATION OF AN OPTICAL SYSTEM USING CO...
Publication number
20220244530
Publication date
Aug 4, 2022
Haifeng Huang
G02 - OPTICS
Information
Patent Application
VACUUM ACTUATOR CONTAINMENT FOR MOLECULAR CONTAMINANT AND PARTICLE...
Publication number
20210048756
Publication date
Feb 18, 2021
KLA Corporation
Zefram D. Marks
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
VAPOR AS A PROTECTANT AND LIFETIME EXTENDER IN OPTICAL SYSTEMS
Publication number
20210041689
Publication date
Feb 11, 2021
KLA Corporation
David Jalil Zare
G02 - OPTICS
Information
Patent Application
System and Method for Generation of Extreme Ultraviolet Light
Publication number
20150076359
Publication date
Mar 19, 2015
KLA-Tencor Corporation
Alexander Bykanov
G01 - MEASURING TESTING
Information
Patent Application
Apparatus And Methods For Reticle Handling In An EUV Reticle Inspec...
Publication number
20130255407
Publication date
Oct 3, 2013
Francis Charles Chilese
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS