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Joseph Foley
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Swampscott, MA, US
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Patents Grants
last 30 patents
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Patent Grant
Bipolar wafer charge monitor system and ion implantation system com...
Patent number
9,558,914
Issue date
Jan 31, 2017
Axcelis Technologies, Inc.
Marvin Farley
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Workpiece handling scan arm for ion implantation system
Patent number
7,560,705
Issue date
Jul 14, 2009
Axcelis Technologies, Inc.
Ari Eiriksson
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
BIPOLAR WAFER CHARGE MONITOR SYSTEM AND ION IMPLANTATION SYSTEM COM...
Publication number
20160247664
Publication date
Aug 25, 2016
Axcelis Technologies, Inc.
Marvin Farley
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WORKPIECE HANDLING SCAN ARM FOR ION IMPLANTATION SYSTEM
Publication number
20080105836
Publication date
May 8, 2008
Ari Eiriksson
H01 - BASIC ELECTRIC ELEMENTS