Joseph G. Garofalo

Person

South Orange, NJ, US

People

Patents Grantslast 30 patents

Information Patent Grant
Auxiliary mask features for enhancing the resolution of photolithog...
- Patent number 5,636,002
- Issue date Jun 3, 1997
- Lucent Technologies Inc.
- Joseph G. Garofalo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Phase-shifting lithographic masks with improved resolution
- Patent number 5,358,827
- Issue date Oct 25, 1994
- AT&T Bell Laboratories
- Joseph G. Garofalo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fabrication of phase-shifting lithographic masks
- Patent number 5,338,626
- Issue date Aug 16, 1994
- AT&T Bell Laboratories
- Joseph G. Garofalo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Self-aligned method of making phase-shifting lithograhic masks havi...
- Patent number 5,308,721
- Issue date May 3, 1994
- AT&T Bell Laboratories
- Joseph G. Garofalo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Single-alignment-level lithographic technique for achieving self-al...
- Patent number 5,275,896
- Issue date Jan 4, 1994
- AT&T Bell Laboratories
- Joseph G. Garofalo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of making phase-shifting lithographic masks
- Patent number 5,153,083
- Issue date Oct 6, 1992
- AT&T Bell Laboratories
- Joseph G. Garofalo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Joseph G. Garofalo

Person

Patents Grantslast 30 patents

Auxiliary mask features for enhancing the resolution of photolithog...

Phase-shifting lithographic masks with improved resolution

Fabrication of phase-shifting lithographic masks

Self-aligned method of making phase-shifting lithograhic masks havi...

Single-alignment-level lithographic technique for achieving self-al...

Method of making phase-shifting lithographic masks