Joseph G. Whelan

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San Francisco, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
System for automated focus measuring of a lithography tool
- Patent number 7,081,948
- Issue date Jul 25, 2006
- ASML Holding N.V.
- Joseph H. Lyons
- G01 - MEASURING TESTING
Information Patent Grant
System and method for automated focus measuring of a lithography tool
- Patent number 6,885,429
- Issue date Apr 26, 2005
- ASML Holding N.V.
- Joseph H. Lyons
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
System for automated focus measuring of a lithography tool
- Publication number 20050179883
- Publication date Aug 18, 2005
- ASML Holding N.V.
- Joseph H. Lyons
- G01 - MEASURING TESTING
Information Patent Application
System and method for automated focus measuring of a lithography tool
- Publication number 20040001192
- Publication date Jan 1, 2004
- Joseph H. Lyons
- G01 - MEASURING TESTING