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Joseph J. Osselburn
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Mt. Laurel, NJ, US
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last 30 patents
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Patent Grant
RF power control device for RF plasma applications
Patent number
6,791,274
Issue date
Sep 14, 2004
Advanced Energy Industries, Inc.
Frederick Hauer
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Plasma processing system
Publication number
20050069651
Publication date
Mar 31, 2005
TOKYO ELECTRON LIMITED
Hideaki Miyoshi
H01 - BASIC ELECTRIC ELEMENTS