Joseph James VEGH

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Sulfur and fluorine containing etch chemistry for improvement of di...
- Patent number 9,484,215
- Issue date Nov 1, 2016
- Lam Research Corporation
- Sanghyuk Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for etching with controlled wiggling
- Patent number 8,828,744
- Issue date Sep 9, 2014
- Lam Research Corporation
- Joseph J. Vegh
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SULFUR AND FLUORINE CONTAINING ETCH CHEMISTRY FOR IMPROVEMENT OF DI...
- Publication number 20160293430
- Publication date Oct 6, 2016
- LAM RESEARCH CORPORATION
- Sanghyuk CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR ETCHING WITH CONTROLLED WIGGLING
- Publication number 20140087486
- Publication date Mar 27, 2014
- LAM RESEARCH CORPORATION
- Joseph J. VEGH
- H01 - BASIC ELECTRIC ELEMENTS