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Joseph Lanucha
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Sunnyvale, CA, US
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last 30 patents
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Patent Grant
Reducing particulate contamination during semiconductor device proc...
Patent number
5,622,595
Issue date
Apr 22, 1997
Applied Materials, Inc.
Anand Gupta
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Control of particle generation within a reaction chamber
Patent number
5,456,796
Issue date
Oct 10, 1995
Applied Materials, Inc.
Anand Gupta
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for reducing particulate contamination during plasma process...
Patent number
5,423,918
Issue date
Jun 13, 1995
Applied Materials, Inc.
Anand Gupta
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Use of electrostatic forces to reduce particle contamination in sem...
Patent number
5,410,122
Issue date
Apr 25, 1995
Applied Materials, Inc.
Yuh-Jia Su
H01 - BASIC ELECTRIC ELEMENTS