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Joseph P. Simon
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Newark, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method and apparatus for heating polishing pad
Patent number
6,896,586
Issue date
May 24, 2005
Lam Research Corporation
Xuyen Pham
B24 - GRINDING POLISHING
Information
Patent Grant
Chemical mechanical planarization (CMP) system and method for deter...
Patent number
6,749,483
Issue date
Jun 15, 2004
Lam Research Corporation
Joseph P. Simon
B24 - GRINDING POLISHING
Information
Patent Grant
Chemical mechanical planarization (CMP) system and method for deter...
Patent number
6,609,952
Issue date
Aug 26, 2003
Lam Research Corporation
Joseph P. Simon
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing apparatus and substrate retainer ring providing continuou...
Patent number
6,447,380
Issue date
Sep 10, 2002
Lam Research Corporation
Xuyen Pham
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
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Patent Application
Chemical mechanical planarization (CMP) system and method for deter...
Publication number
20030190869
Publication date
Oct 9, 2003
LAM RESEARCH CORPORATION
Joseph P. Simon
B24 - GRINDING POLISHING
Information
Patent Application
Method and apparatus for heating polishing pad
Publication number
20030186623
Publication date
Oct 2, 2003
Lam Research Corp.
Xuyen Pham
B24 - GRINDING POLISHING