Joseph R. Breivogel

Person

Aloha, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Orbital motion chemical-mechanical polishing method and apparatus
- Patent number 6,095,904
- Issue date Aug 1, 2000
- Intel Corporation
- Joseph R. Breivogel
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for chemical mechanical polishing
- Patent number 6,083,089
- Issue date Jul 4, 2000
- Intel Corporation
- Joseph R. Breivogel
- B24 - GRINDING POLISHING
Information Patent Grant
Control of chemical-mechanical polishing rate across a substrate su...
- Patent number 5,916,012
- Issue date Jun 29, 1999
- Lam Research Corporation
- Anil K. Pant
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for aligning and tensioning a pad/belt used in...
- Patent number 5,871,390
- Issue date Feb 16, 1999
- Lam Research Corporation
- Anil K. Pant
- B24 - GRINDING POLISHING
Information Patent Grant
Sensors for a linear polisher
- Patent number 5,762,536
- Issue date Jun 9, 1998
- Lam Research Corporation
- Anil K. Pant
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for chemical-mechanical polishing using pneuma...
- Patent number 5,635,083
- Issue date Jun 3, 1997
- Intel Corporation
- Joseph R. Breivogel
- B24 - GRINDING POLISHING
Information Patent Grant
Orbital motion chemical-mechanical polishing apparatus and method o...
- Patent number 5,554,064
- Issue date Sep 10, 1996
- Intel Corporation
- Joseph R. Breivogel
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for conditioning a semiconductor polishing pad
- Patent number 5,547,417
- Issue date Aug 20, 1996
- Intel Corporation
- Joseph R. Breivogel
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing pad conditioning apparatus for wafer planarization process
- Patent number 5,216,843
- Issue date Jun 8, 1993
- Intel Corporation
- Joseph R. Breivogel
- B24 - GRINDING POLISHING
Information Patent Grant
Composite polishing pad for semiconductor process
- Patent number 5,212,910
- Issue date May 25, 1993
- Intel Corporation
- Joseph R. Breivogel
- B24 - GRINDING POLISHING

Joseph R. Breivogel

Person

Patents Grantslast 30 patents

Orbital motion chemical-mechanical polishing method and apparatus

Method and apparatus for chemical mechanical polishing

Control of chemical-mechanical polishing rate across a substrate su...

Method and apparatus for aligning and tensioning a pad/belt used in...

Sensors for a linear polisher

Method and apparatus for chemical-mechanical polishing using pneuma...

Orbital motion chemical-mechanical polishing apparatus and method o...

Method and apparatus for conditioning a semiconductor polishing pad

Polishing pad conditioning apparatus for wafer planarization process

Composite polishing pad for semiconductor process