Joseph R. Monkowski

Person

Carlsbad, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for gas flow control
- Patent number 10,401,202
- Issue date Sep 3, 2019
- PIVOTAL SYSTEMS CORPORATION
- Joseph R. Monkowski
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and apparatus for gas flow control
- Patent number 9,983,595
- Issue date May 29, 2018
- PIVOTAL SYSTEMS CORPORATION
- Adam J. Monkowski
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and apparatus for gas flow control
- Patent number 9,904,297
- Issue date Feb 27, 2018
- PIVOTAL SYSTEMS CORPORATION
- Adam J. Monkowski
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and apparatus for gas flow control
- Patent number 9,523,435
- Issue date Dec 20, 2016
- PIVOTAL SYSTEMS CORPORATION
- Adam J. Monkowski
- G05 - CONTROLLING REGULATING
Information Patent Grant
Transient measurements of mass flow controllers
- Patent number 9,400,004
- Issue date Jul 26, 2016
- Pivotal Systems Corporation
- Joseph R. Monkowski
- F15 - FLUID-PRESSURE ACTUATORS HYDRAULICS OR PNEUMATICS IN GENERAL
Information Patent Grant
Method and apparatus for in situ testing of gas flow controllers
- Patent number 8,857,456
- Issue date Oct 14, 2014
- Pivotal Systems Corporation
- Joseph R. Monkowski
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for in situ testing of gas flow controllers
- Patent number 8,667,830
- Issue date Mar 11, 2014
- Pivotal Systems Corporation
- Joseph R. Monkowski
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for the measurement of atmospheric leaks in th...
- Patent number 8,393,197
- Issue date Mar 12, 2013
- Pivotal Systems Corporation
- Joseph R. Monkowski
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for enhancing in-situ gas flow measurement per...
- Patent number 8,271,211
- Issue date Sep 18, 2012
- Pivotal Systems Corporation
- Sherk Chung
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for enhancing in-situ gas flow measurement per...
- Patent number 8,271,210
- Issue date Sep 18, 2012
- Pivotal Systems Corporation
- Sherk Chung
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for enhancing in-situ gas flow measurement per...
- Patent number 8,265,888
- Issue date Sep 11, 2012
- Pivotal Systems Corporation
- Sherk Chung
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for in situ testing of gas flow controllers
- Patent number 8,240,324
- Issue date Aug 14, 2012
- Pivotal Systems Corporation
- Joseph R. Monkowski
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for identifying the chemical composition of a gas
- Patent number 8,237,928
- Issue date Aug 7, 2012
- Pivotal Systems Corporation
- Joseph R. Monkowski
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for identifying the chemical composition of a gas
- Patent number 7,940,395
- Issue date May 10, 2011
- Pivotal Systems Corporation
- Joseph R. Monkowski
- G01 - MEASURING TESTING
Information Patent Grant
System and method for controlling process end-point utilizing legac...
- Patent number 7,873,052
- Issue date Jan 18, 2011
- Pivotal Systems Corporation
- Sherk Chung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for in situ testing of gas flow controllers
- Patent number 7,823,436
- Issue date Nov 2, 2010
- Pivotal Systems Corporation
- Joseph R. Monkowski
- G01 - MEASURING TESTING
Information Patent Grant
Techniques for calibration of gas flows
- Patent number 7,757,541
- Issue date Jul 20, 2010
- Pivotal Systems Corporation
- Joseph R. Monkowski
- G01 - MEASURING TESTING
Information Patent Grant
Use of modeled parameters for real-time semiconductor process metro...
- Patent number 7,695,984
- Issue date Apr 13, 2010
- Pivotal Systems Corporation
- Joseph R Monkowski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for vacuum chamber leak detection
- Patent number 7,590,498
- Issue date Sep 15, 2009
- Pivotal Systems Corporation
- Sherk Chung
- G01 - MEASURING TESTING
Information Patent Grant
Method of manufacture and resulting thermoelectric module
- Patent number 5,722,158
- Issue date Mar 3, 1998
- Robert E. Fritz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermoelectric module having reduced spacing between semiconductor...
- Patent number 5,515,238
- Issue date May 7, 1996
- Robert E. Fritz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermoelectric module having reduced spacing between semiconductor...
- Patent number 5,434,744
- Issue date Jul 18, 1995
- Robert E. Fritz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
CVD platen heater system utilizing concentric electric heating elem...
- Patent number 5,294,778
- Issue date Mar 15, 1994
- Lam Research Corporation
- Justice Carman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Simultaneous glass deposition and viscoelastic flow process
- Patent number 5,104,482
- Issue date Apr 14, 1992
- Lam Research Corporation
- Joseph R. Monkowski
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition method
- Patent number 5,091,219
- Issue date Feb 25, 1992
- Lam Research Corporation
- Joseph R. Monkowski
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition reactor and method of use thereof
- Patent number 4,976,996
- Issue date Dec 11, 1990
- Lam Research Corporation
- Joseph R. Monkowski
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR CONTROLLED SPLITTING OF FLUID FLOWS
- Publication number 20240385632
- Publication date Nov 21, 2024
- PIVOTAL SYSTEMS CORPORATION
- Joseph R. Monkowski
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD AND APPARATUS FOR GAS FLOW CONTROL
- Publication number 20170052546
- Publication date Feb 23, 2017
- PIVOTAL SYSTEMS CORPORATION
- Adam J. Monkowski
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
METHOD AND APPARATUS FOR GAS FLOW CONTROL
- Publication number 20170010625
- Publication date Jan 12, 2017
- PIVOTAL SYSTEMS CORPORATION
- Joseph R. Monkowski
- G01 - MEASURING TESTING
Information Patent Application
Mass Flow Controller with Multiple Communication Protocols
- Publication number 20160161953
- Publication date Jun 9, 2016
- PIVOTAL SYSTEMS CORPORATION
- Joseph Monkowski
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD AND APPARATUS FOR GAS FLOW CONTROL
- Publication number 20140366952
- Publication date Dec 18, 2014
- Adam J. Monkowski
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
METHOD AND APPARATUS FOR GAS FLOW CONTROL
- Publication number 20140367596
- Publication date Dec 18, 2014
- Adam J. Monkowski
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
METHOD AND APPARATUS FOR IN SITU TESTING OF GAS FLOW CONTROLLERS
- Publication number 20120304781
- Publication date Dec 6, 2012
- Pivotal Systems Corporation
- Joseph R. Monkowski
- G01 - MEASURING TESTING
Information Patent Application
TRANSIENT MEASUREMENTS OF MASS FLOW CONTROLLERS
- Publication number 20120132291
- Publication date May 31, 2012
- Pivotal Systems Corporation
- Joseph R. MONKOWSKI
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD AND APPARATUS FOR IDENTIFYING THE CHEMICAL COMPOSITION OF A GAS
- Publication number 20110177625
- Publication date Jul 21, 2011
- Pivotal Systems Corporation
- Joseph R. Monkowski
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR ENHANCING IN-SITU GAS FLOW MEASUREMENT PER...
- Publication number 20110137583
- Publication date Jun 9, 2011
- Pivotal Systems Corporation
- Sherk CHUNG
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR ENHANCING IN-SITU GAS FLOW MEASUREMENT PER...
- Publication number 20110137582
- Publication date Jun 9, 2011
- Pivotal Systems Corporation
- Sherk CHUNG
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR ENHANCING IN-SITU GAS FLOW MEASUREMENT PER...
- Publication number 20110137581
- Publication date Jun 9, 2011
- Pivotal Systems Corporation
- Sherk CHUNG
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR GAS FLOW CONTROL
- Publication number 20110108126
- Publication date May 12, 2011
- Pivotal Systems Corporation
- Adam J. MONKOWSKI
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD AND APPARATUS FOR IN SITU TESTING OF GAS FLOW CONTROLLERS
- Publication number 20110011183
- Publication date Jan 20, 2011
- Pivotal Systems Corporation
- Joseph R. Monkowski
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR THE MEASUREMENT OF ATMOSPHERIC LEAKS IN TH...
- Publication number 20100018293
- Publication date Jan 28, 2010
- Pivotal Systems Corporation
- Joseph R. Monkowski
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR IN SITU TESTING OF GAS FLOW CONTROLLERS
- Publication number 20090183548
- Publication date Jul 23, 2009
- Pivotal Systems Corporation
- Joseph R. Monkowski
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR IN SITU TESTING OF GAS FLOW CONTROLLERS
- Publication number 20090183549
- Publication date Jul 23, 2009
- Pivotal Systems Corporation
- Joseph R. Monkowski
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR IDENTIFYING THE CHEMICAL COMPOSITION OF A GAS
- Publication number 20090180113
- Publication date Jul 16, 2009
- Pivotal Systems Corporation
- Joseph R. Monkowski
- G01 - MEASURING TESTING
Information Patent Application
System and method for controlling process end-point utilizing legac...
- Publication number 20080253377
- Publication date Oct 16, 2008
- Pivotal Systems Corporation
- Sherk Chung
- H01 - BASIC ELECTRIC ELEMENTS

Joseph R. Monkowski

Person

Patents Grantslast 30 patents

Method and apparatus for gas flow control

Method and apparatus for gas flow control

Method and apparatus for gas flow control

Method and apparatus for gas flow control

Transient measurements of mass flow controllers

Method and apparatus for in situ testing of gas flow controllers

Method and apparatus for in situ testing of gas flow controllers

Method and apparatus for the measurement of atmospheric leaks in th...

Method and apparatus for enhancing in-situ gas flow measurement per...

Method and apparatus for enhancing in-situ gas flow measurement per...

Method and apparatus for enhancing in-situ gas flow measurement per...

Method and apparatus for in situ testing of gas flow controllers

Method and apparatus for identifying the chemical composition of a gas

Method and apparatus for identifying the chemical composition of a gas

System and method for controlling process end-point utilizing legac...

Method and apparatus for in situ testing of gas flow controllers

Techniques for calibration of gas flows

Use of modeled parameters for real-time semiconductor process metro...

System and method for vacuum chamber leak detection

Method of manufacture and resulting thermoelectric module

Thermoelectric module having reduced spacing between semiconductor...

Thermoelectric module having reduced spacing between semiconductor...

CVD platen heater system utilizing concentric electric heating elem...

Simultaneous glass deposition and viscoelastic flow process

Chemical vapor deposition method

Chemical vapor deposition reactor and method of use thereof

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR CONTROLLED SPLITTING OF FLUID FLOWS

METHOD AND APPARATUS FOR GAS FLOW CONTROL

METHOD AND APPARATUS FOR GAS FLOW CONTROL

Mass Flow Controller with Multiple Communication Protocols

METHOD AND APPARATUS FOR GAS FLOW CONTROL

METHOD AND APPARATUS FOR GAS FLOW CONTROL

METHOD AND APPARATUS FOR IN SITU TESTING OF GAS FLOW CONTROLLERS

TRANSIENT MEASUREMENTS OF MASS FLOW CONTROLLERS

METHOD AND APPARATUS FOR IDENTIFYING THE CHEMICAL COMPOSITION OF A GAS

METHOD AND APPARATUS FOR ENHANCING IN-SITU GAS FLOW MEASUREMENT PER...

METHOD AND APPARATUS FOR ENHANCING IN-SITU GAS FLOW MEASUREMENT PER...

METHOD AND APPARATUS FOR ENHANCING IN-SITU GAS FLOW MEASUREMENT PER...

METHOD AND APPARATUS FOR GAS FLOW CONTROL

METHOD AND APPARATUS FOR IN SITU TESTING OF GAS FLOW CONTROLLERS

METHOD AND APPARATUS FOR THE MEASUREMENT OF ATMOSPHERIC LEAKS IN TH...

METHOD AND APPARATUS FOR IN SITU TESTING OF GAS FLOW CONTROLLERS

METHOD AND APPARATUS FOR IN SITU TESTING OF GAS FLOW CONTROLLERS

METHOD AND APPARATUS FOR IDENTIFYING THE CHEMICAL COMPOSITION OF A GAS

System and method for controlling process end-point utilizing legac...