Joseph Yudovsky

Person

Campbell, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus and methods for semiconductor processing
- Patent number 12,230,530
- Issue date Feb 18, 2025
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for wafer chucking on a susceptor for ALD
- Patent number 12,112,969
- Issue date Oct 8, 2024
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for semiconductor processing
- Patent number 11,984,343
- Issue date May 14, 2024
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Enhanced spatial ALD of metals through controlled precursor mixing
- Patent number 11,887,856
- Issue date Jan 30, 2024
- Applied Materials, Inc.
- Kelvin Chan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Contour pocket and hybrid susceptor for wafer uniformity
- Patent number 11,810,810
- Issue date Nov 7, 2023
- Applied Materials, Inc.
- Kaushal Gangakhedkar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In-situ wafer rotation for carousel processing chambers
- Patent number 11,798,825
- Issue date Oct 24, 2023
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Contour pocket and hybrid susceptor for wafer uniformity
- Patent number 11,557,501
- Issue date Jan 17, 2023
- Applied Materials, Inc.
- Kaushal Gangakhedkar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Injector for batch processing and methods of use
- Patent number 11,530,480
- Issue date Dec 20, 2022
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Position and temperature monitoring of ALD platen susceptor
- Patent number 11,430,680
- Issue date Aug 30, 2022
- Applied Materials, Inc.
- Abraham Ravid
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for providing uniform flow of gas
- Patent number RE48994
- Issue date Mar 29, 2022
- Applied Materials, Inc.
- Joseph Yudovsky
Information Patent Grant
Injector for batch processing and methods of use
- Patent number 11,261,525
- Issue date Mar 1, 2022
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Patterned vacuum chuck for double-sided processing
- Patent number 11,222,809
- Issue date Jan 11, 2022
- Applied Materials, Inc.
- Joseph Yudovsky
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Rotary reactor for uniform particle coating with thin films
- Patent number 11,180,851
- Issue date Nov 23, 2021
- Applied Materials, Inc.
- Colin C. Neikirk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rotary reactor for uniform particle coating with thin films
- Patent number 11,174,552
- Issue date Nov 16, 2021
- Applied Materials, Inc.
- Colin C. Neikirk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for wafer chucking on a susceptor for ALD
- Patent number 11,094,577
- Issue date Aug 17, 2021
- Applied Materials, Inc.
- Joseph Yudovsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device to increase deposition uniformity in spatial ALD processing...
- Patent number 11,085,129
- Issue date Aug 10, 2021
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Enhanced spatial ALD of metals through controlled precursor mixing
- Patent number 11,043,386
- Issue date Jun 22, 2021
- Applied Materials, Inc.
- Kelvin Chan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temporal atomic layer deposition process chamber
- Patent number 10,954,596
- Issue date Mar 23, 2021
- Applied Materials, Inc.
- Alexander S. Polyak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High temperature heater for processing chamber
- Patent number 10,959,294
- Issue date Mar 23, 2021
- Applied Materials, Inc.
- Alexander S. Polyak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for susceptor temperature verification and methods of use
- Patent number 10,900,125
- Issue date Jan 26, 2021
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for wafer rotation in carousel susceptor
- Patent number 10,861,736
- Issue date Dec 8, 2020
- Applied Materials, Inc.
- Kaushal Gangakhedkar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Contour pocket and hybrid susceptor for wafer uniformity
- Patent number 10,685,864
- Issue date Jun 16, 2020
- Applied Materials, Inc.
- Kaushal Gangakhedkar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for prevention of backside deposition in a spatial ALD pr...
- Patent number 10,658,223
- Issue date May 19, 2020
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Susceptor position and rational apparatus and methods of use
- Patent number 10,597,779
- Issue date Mar 24, 2020
- Applied Materials, Inc.
- William T. Weaver
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer processing systems including multi-position batch load lock a...
- Patent number 10,586,720
- Issue date Mar 10, 2020
- Applied Materials, Inc.
- William T. Weaver
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Atmospheric lid with rigid plate for carousel processing chambers
- Patent number 10,508,340
- Issue date Dec 17, 2019
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device to increase deposition uniformity in spatial ALD processing...
- Patent number 10,494,736
- Issue date Dec 3, 2019
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Non-metallic thermal CVD/ALD Gas Injector and Purge Systems
- Patent number 10,415,137
- Issue date Sep 17, 2019
- Applied Materials, Inc.
- Alexander S. Polyak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integrated two-axis lift-rotation motor center pedestal in multi-wa...
- Patent number 10,351,956
- Issue date Jul 16, 2019
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for providing uniform flow of gas
- Patent number RE47440
- Issue date Jun 18, 2019
- Applied Materials, Inc.
- Joseph Yudovsky

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHODS FOR SEMICONDUCTOR PROCESSING
- Publication number 20240258153
- Publication date Aug 1, 2024
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHODS FOR SEMICONDUCTOR PROCESSING
- Publication number 20230146344
- Publication date May 11, 2023
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTOUR POCKET AND HYBRID SUSCEPTOR FOR WAFER UNIFORMITY
- Publication number 20230116396
- Publication date Apr 13, 2023
- Applied Materials, Inc.
- Kaushal Gangakhedkar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Injector For Batch Processing And Methods Of Use
- Publication number 20220162748
- Publication date May 26, 2022
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ROTARY REACTOR FOR UNIFORM PARTICLE COATING WITH THIN FILMS
- Publication number 20220064794
- Publication date Mar 3, 2022
- Applied Materials, Inc.
- Colin C. Neikirk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and Methods for Wafer Chucking on a Susceptor for ALD
- Publication number 20210384063
- Publication date Dec 9, 2021
- Applied Materials, Inc.
- Joseph Yudovsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM PVD ENDPOINT DETECTION AND CLOSED-LOOP PROCESS CONTRO...
- Publication number 20210062324
- Publication date Mar 4, 2021
- Applied Materials, Inc.
- David Masayuki ISHIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM PVD ENDPOINT DETECTION AND CLOSED-LOOP PROCESS CONTRO...
- Publication number 20210062326
- Publication date Mar 4, 2021
- Applied Materials, Inc.
- David Masayuki ISHIKAWA
- G01 - MEASURING TESTING
Information Patent Application
DEFLECTION RESTRAINT SYSTEM FOR BUILD PLATE IN ADDITIVE MANUFACTURING
- Publication number 20210053286
- Publication date Feb 25, 2021
- Applied Materials, Inc.
- Joseph Yudovsky
- B22 - CASTING POWDER METALLURGY
Information Patent Application
PATTERNED VACUUM CHUCK FOR DOUBLE-SIDED PROCESSING
- Publication number 20200373188
- Publication date Nov 26, 2020
- Applied Materials, Inc.
- Joseph YUDOVSKY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Contour Pocket and Hybrid Susceptor for Wafer Uniformity
- Publication number 20200312702
- Publication date Oct 1, 2020
- Applied Materials, Inc.
- Kaushal Gangakhedkar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GATE VALVE FOR CONTINUOUS TOW PROCESSING
- Publication number 20200292084
- Publication date Sep 17, 2020
- Applied Materials, Inc.
- Joseph YUDOVSKY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
QUALIFICATION AND REPAIR STATION
- Publication number 20200290835
- Publication date Sep 17, 2020
- Applied Materials, Inc.
- Andreas SCHMID
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
Device To Increase Deposition Uniformity In Spatial ALD Processing...
- Publication number 20200087816
- Publication date Mar 19, 2020
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Temporal Atomic Layer Deposition Process Chamber
- Publication number 20200032396
- Publication date Jan 30, 2020
- Applied Materials, Inc.
- Alexander S. Polyak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ROTARY REACTOR FOR UNIFORM PARTICLE COATING WITH THIN FILMS
- Publication number 20190376182
- Publication date Dec 12, 2019
- Colin C. Neikirk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Rotary Reactor for Uniform Particle Coating with Thin Films
- Publication number 20190376181
- Publication date Dec 12, 2019
- Colin C. Neikirk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
In-Situ Wafer Rotation for Carousel Processing Chambers
- Publication number 20190333783
- Publication date Oct 31, 2019
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PATTERNED VACUUM CHUCK FOR DOUBLE-SIDED PROCESSING
- Publication number 20190259648
- Publication date Aug 22, 2019
- Applied Materials, Inc.
- Joseph YUDOVSKY
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Position And Temperature Monitoring Of ALD Platen Susceptor
- Publication number 20190244842
- Publication date Aug 8, 2019
- Applied Materials, Inc.
- Abraham Ravid
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER PROCESSING SYSTEMS INCLUDING MULTI-POSITION BATCH LOAD LOCK A...
- Publication number 20190198368
- Publication date Jun 27, 2019
- Applied Materials, Inc.
- William T. Weaver
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus And Methods For Wafer Rotation In Carousel Susceptor
- Publication number 20190189498
- Publication date Jun 20, 2019
- Applied Materials, Inc.
- Kaushal Gangakhedkar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Spring-Loaded Pins For Susceptor Assembly And Processing Methods Us...
- Publication number 20190109036
- Publication date Apr 11, 2019
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Enhanced Spatial ALD Of Metals Through Controlled Precursor Mixing
- Publication number 20180240676
- Publication date Aug 23, 2018
- Applied Materials, Inc.
- Kelvin Chan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHODS FOR WAFER CHUCKING ON A SUSCEPTOR FOR ALD
- Publication number 20180211863
- Publication date Jul 26, 2018
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus And Methods For Wafer Rotation To Improve Spatial ALD Pro...
- Publication number 20180190535
- Publication date Jul 5, 2018
- Applied Materials, Inc.
- William T. Weaver
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Integrated Atomic Layer Deposition Tool
- Publication number 20180155834
- Publication date Jun 7, 2018
- Applied Materials, Inc.
- Mukund Srinivasan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Device To Increase Deposition Uniformity In Spatial ALD Processing...
- Publication number 20180002830
- Publication date Jan 4, 2018
- Applied Materials, Inc.
- Joseph Yudovsky
- C30 - CRYSTAL GROWTH
Information Patent Application
Apparatus For Susceptor Temperature Verification And Methods Of Use
- Publication number 20170370001
- Publication date Dec 28, 2017
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Contour Pocket And Hybrid Susceptor For Wafer Uniformity
- Publication number 20170352575
- Publication date Dec 7, 2017
- Applied Materials, Inc.
- Kaushal Gangakhedkar
- H01 - BASIC ELECTRIC ELEMENTS

Joseph Yudovsky

Person

Patents Grantslast 30 patents

Apparatus and methods for semiconductor processing

Apparatus and methods for wafer chucking on a susceptor for ALD

Apparatus and methods for semiconductor processing

Enhanced spatial ALD of metals through controlled precursor mixing

Contour pocket and hybrid susceptor for wafer uniformity

In-situ wafer rotation for carousel processing chambers

Contour pocket and hybrid susceptor for wafer uniformity

Injector for batch processing and methods of use

Position and temperature monitoring of ALD platen susceptor

Apparatus and method for providing uniform flow of gas

Injector for batch processing and methods of use

Patterned vacuum chuck for double-sided processing

Rotary reactor for uniform particle coating with thin films

Rotary reactor for uniform particle coating with thin films

Apparatus and methods for wafer chucking on a susceptor for ALD

Device to increase deposition uniformity in spatial ALD processing...

Enhanced spatial ALD of metals through controlled precursor mixing

Temporal atomic layer deposition process chamber

High temperature heater for processing chamber

Apparatus for susceptor temperature verification and methods of use

Apparatus and methods for wafer rotation in carousel susceptor

Contour pocket and hybrid susceptor for wafer uniformity

Apparatus for prevention of backside deposition in a spatial ALD pr...

Susceptor position and rational apparatus and methods of use

Wafer processing systems including multi-position batch load lock a...

Atmospheric lid with rigid plate for carousel processing chambers

Device to increase deposition uniformity in spatial ALD processing...

Non-metallic thermal CVD/ALD Gas Injector and Purge Systems

Integrated two-axis lift-rotation motor center pedestal in multi-wa...

Apparatus and method for providing uniform flow of gas

Patents Applicationslast 30 patents

APPARATUS AND METHODS FOR SEMICONDUCTOR PROCESSING

APPARATUS AND METHODS FOR SEMICONDUCTOR PROCESSING

CONTOUR POCKET AND HYBRID SUSCEPTOR FOR WAFER UNIFORMITY

Injector For Batch Processing And Methods Of Use

ROTARY REACTOR FOR UNIFORM PARTICLE COATING WITH THIN FILMS

Apparatus and Methods for Wafer Chucking on a Susceptor for ALD

ELECTRON BEAM PVD ENDPOINT DETECTION AND CLOSED-LOOP PROCESS CONTRO...

ELECTRON BEAM PVD ENDPOINT DETECTION AND CLOSED-LOOP PROCESS CONTRO...

DEFLECTION RESTRAINT SYSTEM FOR BUILD PLATE IN ADDITIVE MANUFACTURING

PATTERNED VACUUM CHUCK FOR DOUBLE-SIDED PROCESSING

Contour Pocket and Hybrid Susceptor for Wafer Uniformity

GATE VALVE FOR CONTINUOUS TOW PROCESSING

QUALIFICATION AND REPAIR STATION

Device To Increase Deposition Uniformity In Spatial ALD Processing...

Temporal Atomic Layer Deposition Process Chamber

ROTARY REACTOR FOR UNIFORM PARTICLE COATING WITH THIN FILMS

Rotary Reactor for Uniform Particle Coating with Thin Films

In-Situ Wafer Rotation for Carousel Processing Chambers

PATTERNED VACUUM CHUCK FOR DOUBLE-SIDED PROCESSING

Position And Temperature Monitoring Of ALD Platen Susceptor

WAFER PROCESSING SYSTEMS INCLUDING MULTI-POSITION BATCH LOAD LOCK A...

Apparatus And Methods For Wafer Rotation In Carousel Susceptor

Spring-Loaded Pins For Susceptor Assembly And Processing Methods Us...

Enhanced Spatial ALD Of Metals Through Controlled Precursor Mixing

APPARATUS AND METHODS FOR WAFER CHUCKING ON A SUSCEPTOR FOR ALD

Apparatus And Methods For Wafer Rotation To Improve Spatial ALD Pro...

Integrated Atomic Layer Deposition Tool

Device To Increase Deposition Uniformity In Spatial ALD Processing...

Apparatus For Susceptor Temperature Verification And Methods Of Use

Contour Pocket And Hybrid Susceptor For Wafer Uniformity