Josephus Antonius Maria Van Bommel

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Sint Michielsgestel, NL

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Patents Grantslast 30 patents

Information Patent Grant
Sensor for lithographic apparatus and method of obtaining measureme...
- Patent number 7,599,811
- Issue date Oct 6, 2009
- ASML Netherlands B.V.
- Frits Jurgen Van Hout
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY