Josephus Cornelius Johannes Antonius Vugts

Follow

Person

Goirle, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Lithographic apparatus and method of cleaning a surface of an immer...
- Patent number 9,289,802
- Issue date Mar 22, 2016
- ASML Netherlands B.V.
- Anthonius Martinus Cornelis Petrus De Jong
- B08 - CLEANING
Information Patent Grant
Conduit system for a lithographic apparatus, lithographic apparatus...
- Patent number 8,976,332
- Issue date Mar 10, 2015
- ASML Netherlands B.V.
- Martinus Wilhelmus Van Den Heuvel
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL