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Joshua Chiu-Wing Tsui
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Santa Clara, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Plasma reactor having an inductive antenna coupling power through a...
Patent number
6,623,596
Issue date
Sep 23, 2003
Applied Materials, Inc.
Kenneth S. Collins
A21 - BAKING EDIBLE DOUGHS
Information
Patent Grant
Parallel-plate electrode plasma reactor having an inductive antenna...
Patent number
6,524,432
Issue date
Feb 25, 2003
Applied Materials Inc.
Kenneth Collins
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Inductively coupled RF Plasma reactor having an overhead solenoidal...
Patent number
6,454,898
Issue date
Sep 24, 2002
Applied Materials, Inc.
Kenneth Collins
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma reactor having an inductive antenna coupling power through a...
Patent number
6,077,384
Issue date
Jun 20, 2000
Applied Materials, Inc.
Kenneth S. Collins
A21 - BAKING EDIBLE DOUGHS
Information
Patent Grant
Inductively coupled RF plasma reactor having an overhead solenoidal...
Patent number
6,074,512
Issue date
Jun 13, 2000
Applied Materials, Inc.
Kenneth Collins
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Parallel plate electrode plasma reactor having an inductive antenna...
Patent number
6,054,013
Issue date
Apr 25, 2000
Applied Materials, Inc.
Kenneth Collins
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck with an impregnated, porous layer that exhibits...
Patent number
5,916,689
Issue date
Jun 29, 1999
Applied Materials, Inc.
Kenneth S. Collins
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Electrostatic chuck with polymeric impregnation and method of making
Patent number
5,800,871
Issue date
Sep 1, 1998
Applied Materials, Inc.
Kenneth S. Collins
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Electrostatic chuck with polymeric impregnation and method of making
Patent number
5,792,562
Issue date
Aug 11, 1998
Applied Materials, Inc.
Kenneth S. Collins
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Plasma guard for chamber equipped with electrostatic chuck
Patent number
5,762,714
Issue date
Jun 9, 1998
Applied Materials, Inc.
Jon Mohn
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck usable in high density plasma
Patent number
5,583,737
Issue date
Dec 10, 1996
Applied Materials, Inc.
Kenneth S. Collins
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck usable in high density plasma
Patent number
5,539,609
Issue date
Jul 23, 1996
Applied Materials, Inc.
Kenneth S. Collins
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck for high power plasma processing
Patent number
5,350,479
Issue date
Sep 27, 1994
Applied Materials, Inc.
Kenneth S. Collins
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
CHAMBER PLASMA-CLEANING PROCESS SCHEME
Publication number
20100024840
Publication date
Feb 4, 2010
CHANG-LIN HSIEH
B08 - CLEANING