Joshua E. Byrne

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Los Altos, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Chamber monitoring and adjustment by plasma RF metrology
- Patent number 6,051,284
- Issue date Apr 18, 2000
- Applied Materials, Inc.
- Joshua Byrne
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Corrosion-resistant aluminum article for semiconductor processing e...
- Patent number 5,811,195
- Issue date Sep 22, 1998
- Applied Materials, Inc.
- Craig Bercaw
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Corrosion-resistant aluminum article for semiconductor processing e...
- Patent number 5,756,222
- Issue date May 26, 1998
- Applied Materials, Inc.
- Craig A. Bercaw
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...