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Josselin Pello
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Eindhoven, NL
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Patents Grants
last 30 patents
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Patent Grant
Metrology method and apparatus, computer program and lithographic s...
Patent number
9,879,988
Issue date
Jan 30, 2018
ASML Netherlands B.V.
Xing Lan Liu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Metrology Method and Apparatus, Computer Program and Lithographic S...
Publication number
20160223322
Publication date
Aug 4, 2016
ASML Netherlands B.V.
Xing Lan LIU
G01 - MEASURING TESTING