Jothilingam RAMALINGAM

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and chamber for backside physical vapor deposition
- Patent number 12,142,478
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Chunming Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dose reduction of patterned metal oxide photoresists
- Patent number 11,994,800
- Issue date May 28, 2024
- Applied Materials, Inc.
- Tejinder Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for physical vapor deposition (PVD) dielectri...
- Patent number 11,842,890
- Issue date Dec 12, 2023
- Applied Materials, Inc.
- Jothilingam Ramalingam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for passivating a target
- Patent number 11,661,651
- Issue date May 30, 2023
- Applied Materials, Inc.
- Chao Du
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for reducing tungsten resistivity
- Patent number 11,655,534
- Issue date May 23, 2023
- Applied Materials, Inc.
- Wenting Hou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and chamber for backside physical vapor deposition
- Patent number 11,572,618
- Issue date Feb 7, 2023
- Applied Materials, Inc.
- Jothilingam Ramalingam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dose reduction of patterned metal oxide photoresists
- Patent number 11,550,222
- Issue date Jan 10, 2023
- Applied Materials, Inc.
- Tejinder Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for passivating a target
- Patent number 11,512,387
- Issue date Nov 29, 2022
- Applied Materials, Inc.
- Chao Du
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film stack for lithography applications
- Patent number 11,495,461
- Issue date Nov 8, 2022
- Applied Materials, Inc.
- Tejinder Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and chamber for backside physical vapor deposition
- Patent number 11,469,096
- Issue date Oct 11, 2022
- Applied Materials, Inc.
- Chunming Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for reducing tungsten resistivity
- Patent number 11,447,857
- Issue date Sep 20, 2022
- Applied Materials, Inc.
- Wenting Hou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of reducing particles in a physical vapor deposition (PVD)...
- Patent number 11,450,514
- Issue date Sep 20, 2022
- Applied Materials, Inc.
- Wei Dou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for enhancing flow uniformity in a process chamber
- Patent number 11,270,898
- Issue date Mar 8, 2022
- Applied Materials, Inc.
- Jothilingam Ramalingam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for low resistivity physical vapor deposition o...
- Patent number 10,734,235
- Issue date Aug 4, 2020
- Applied Materials, Inc.
- Jothilingam Ramalingam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and devices using PVD ruthenium
- Patent number 10,388,532
- Issue date Aug 20, 2019
- Applied Materials, Inc.
- Jothilingam Ramalingam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for low resistivity physical vapor deposition o...
- Patent number 10,043,670
- Issue date Aug 7, 2018
- Applied Materials, Inc.
- Jothilingam Ramalingam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tungsten silicide nitride films and methods of formation
- Patent number 9,461,137
- Issue date Oct 4, 2016
- Applied Materials, Inc.
- Jothilingam Ramalingam
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHODS AND APPARATUS FOR PHYSICAL VAPOR DEPOSITION (PVD) DIELECTRI...
- Publication number 20240105433
- Publication date Mar 28, 2024
- Applied Materials, Inc.
- Jothilingam RAMALINGAM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND CHAMBER FOR BACKSIDE PHYSICAL VAPOR DEPOSITION
- Publication number 20230335393
- Publication date Oct 19, 2023
- Applied Materials, Inc.
- Chunming ZHOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DOSE REDUCTION OF PATTERNED METAL OXIDE PHOTORESISTS
- Publication number 20230115004
- Publication date Apr 13, 2023
- Applied Materials, Inc.
- Tejinder SINGH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND CHAMBER FOR BACKSIDE PHYSICAL VAPOR DEPOSITION
- Publication number 20220415649
- Publication date Dec 29, 2022
- Applied Materials, Inc.
- Chunming ZHOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR REDUCING TUNGSTEN RESITIVITY
- Publication number 20220341025
- Publication date Oct 27, 2022
- Applied Materials, Inc.
- Wenting HOU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR PASSIVATING A TARGET
- Publication number 20220307126
- Publication date Sep 29, 2022
- Applied Materials, Inc.
- Chao DU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF REDUCING PARTICLES IN A PHYSICAL VAPOR DEPOSITION (PVD)...
- Publication number 20220301828
- Publication date Sep 22, 2022
- Wei DOU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR REDUCING TUNGSTEN RESITIVITY
- Publication number 20220081756
- Publication date Mar 17, 2022
- Applied Materials, Inc.
- Wenting HOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR PASSIVATING A TARGET
- Publication number 20210317568
- Publication date Oct 14, 2021
- Applied Materials, Inc.
- Chao DU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND CHAMBER FOR BACKSIDE PHYSICAL VAPOR DEPOSITION
- Publication number 20210062325
- Publication date Mar 4, 2021
- Applied Materials, Inc.
- Jothilingam RAMALINGAM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR PHYSICAL VAPOR DEPOSITION (PVD) DIELECTRI...
- Publication number 20210050195
- Publication date Feb 18, 2021
- Applied Materials, Inc.
- Jothilingam RAMALINGAM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DOSE REDUCTION OF PATTERNED METAL OXIDE PHOTORESISTS
- Publication number 20210033974
- Publication date Feb 4, 2021
- Applied Materials, Inc.
- Tejinder SINGH
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND CHAMBER FOR BACKSIDE PHYSICAL VAPOR DEPOSITION
- Publication number 20200350160
- Publication date Nov 5, 2020
- Applied Materials, Inc.
- Chunming ZHOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM STACK FOR LITHOGRAPHY APPLICATIONS
- Publication number 20200273705
- Publication date Aug 27, 2020
- Applied Materials, Inc.
- Tejinder SINGH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH POWER IMPULSE MAGNETRON SPUTTERING PHYSICAL VAPOR DEPOSITION O...
- Publication number 20200048760
- Publication date Feb 13, 2020
- KISHOR KALATHIPARAMBIL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR LOW RESISTIVITY PHYSICAL VAPOR DEPOSITION O...
- Publication number 20180337052
- Publication date Nov 22, 2018
- Applied Materials, Inc.
- Jothilingam RAMALINGAM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods and Devices Using PVD Ruthenium
- Publication number 20180096852
- Publication date Apr 5, 2018
- Applied Materials, Inc.
- Jothilingam Ramalingam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR LOW RESISTIVITY PHYSICAL VAPOR DEPOSITION O...
- Publication number 20170117153
- Publication date Apr 27, 2017
- Applied Materials, Inc.
- Jothilingam RAMALINGAM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE REDUCTION IN A DEPOSITION CHAMBER USING THERMAL EXPANSION...
- Publication number 20160168687
- Publication date Jun 16, 2016
- Applied Materials, Inc.
- JOTHILINGAM RAMALINGAM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MAKING SOURCE/DRAIN CONTACTS BY SPUTTERING A DOPED TARGET
- Publication number 20150118833
- Publication date Apr 30, 2015
- Applied Materials, Inc.
- Jianxin LEI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Jothilingam RAMALINGAM

Person

Patents Grantslast 30 patents

Method and chamber for backside physical vapor deposition

Dose reduction of patterned metal oxide photoresists

Methods and apparatus for physical vapor deposition (PVD) dielectri...

Methods and apparatus for passivating a target

Apparatus for reducing tungsten resistivity

Method and chamber for backside physical vapor deposition

Dose reduction of patterned metal oxide photoresists

Methods and apparatus for passivating a target

Film stack for lithography applications

Method and chamber for backside physical vapor deposition

Methods and apparatus for reducing tungsten resistivity

Methods of reducing particles in a physical vapor deposition (PVD)...

Apparatus for enhancing flow uniformity in a process chamber

Systems and methods for low resistivity physical vapor deposition o...

Methods and devices using PVD ruthenium

Systems and methods for low resistivity physical vapor deposition o...

Tungsten silicide nitride films and methods of formation

Patents Applicationslast 30 patents

METHODS AND APPARATUS FOR PHYSICAL VAPOR DEPOSITION (PVD) DIELECTRI...

METHOD AND CHAMBER FOR BACKSIDE PHYSICAL VAPOR DEPOSITION

DOSE REDUCTION OF PATTERNED METAL OXIDE PHOTORESISTS

METHOD AND CHAMBER FOR BACKSIDE PHYSICAL VAPOR DEPOSITION

APPARATUS FOR REDUCING TUNGSTEN RESITIVITY

METHODS AND APPARATUS FOR PASSIVATING A TARGET

METHODS OF REDUCING PARTICLES IN A PHYSICAL VAPOR DEPOSITION (PVD)...

METHODS AND APPARATUS FOR REDUCING TUNGSTEN RESITIVITY

METHODS AND APPARATUS FOR PASSIVATING A TARGET

METHOD AND CHAMBER FOR BACKSIDE PHYSICAL VAPOR DEPOSITION

METHODS AND APPARATUS FOR PHYSICAL VAPOR DEPOSITION (PVD) DIELECTRI...

DOSE REDUCTION OF PATTERNED METAL OXIDE PHOTORESISTS

METHOD AND CHAMBER FOR BACKSIDE PHYSICAL VAPOR DEPOSITION

FILM STACK FOR LITHOGRAPHY APPLICATIONS

HIGH POWER IMPULSE MAGNETRON SPUTTERING PHYSICAL VAPOR DEPOSITION O...

SYSTEMS AND METHODS FOR LOW RESISTIVITY PHYSICAL VAPOR DEPOSITION O...

Methods and Devices Using PVD Ruthenium

SYSTEMS AND METHODS FOR LOW RESISTIVITY PHYSICAL VAPOR DEPOSITION O...

PARTICLE REDUCTION IN A DEPOSITION CHAMBER USING THERMAL EXPANSION...

METHOD OF MAKING SOURCE/DRAIN CONTACTS BY SPUTTERING A DOPED TARGET