Jou-Hsuan LU

Person

Hsinchu, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Droplet generator assembly and method of replacing components
- Patent number 12,063,734
- Issue date Aug 13, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Kuang Sun
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
EUV photolithography system fuel source and methods of operating th...
- Patent number 11,809,083
- Issue date Nov 7, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Cheng-Hao Lai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
DROPLET GENERATOR ASSEMBLY AND METHOD OF REPLACING COMPONENTS
- Publication number 20240365460
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Kuang SUN
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
DROPLET GENERATOR ASSEMBLY AND METHOD OF REPLACING COMPONENTS
- Publication number 20240365461
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Kuang SUN
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EUV PHOTOLITHOGRAPHY SYSTEM FUEL SOURCE AND METHODS OF OPERATING TH...
- Publication number 20230375938
- Publication date Nov 23, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Cheng-Hao LAI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR MONITORING AN EXTREME ULTRAVIOLET RADIATIO...
- Publication number 20230345610
- Publication date Oct 26, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Kuang SUN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SEMICONDUCTOR SYSTEM INSPECTION TOOL AND METHODS OF OPERATION
- Publication number 20220408538
- Publication date Dec 22, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jou-Hsuan LU
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
DROPLET GENERATOR ASSEMBLY AND METHOD OF REPLACING COMPONENTS
- Publication number 20220338335
- Publication date Oct 20, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Kuang SUN
- G05 - CONTROLLING REGULATING
Information Patent Application
EUV PHOTOLITHOGRAPHY SYSTEM FUEL SOURCE AND METHODS OF OPERATING TH...
- Publication number 20220334495
- Publication date Oct 20, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Cheng-Hao LAI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Jou-Hsuan LU

Person

Patents Grantslast 30 patents

Droplet generator assembly and method of replacing components

EUV photolithography system fuel source and methods of operating th...

Patents Applicationslast 30 patents

DROPLET GENERATOR ASSEMBLY AND METHOD OF REPLACING COMPONENTS

DROPLET GENERATOR ASSEMBLY AND METHOD OF REPLACING COMPONENTS

EUV PHOTOLITHOGRAPHY SYSTEM FUEL SOURCE AND METHODS OF OPERATING TH...

METHOD AND APPARATUS FOR MONITORING AN EXTREME ULTRAVIOLET RADIATIO...

SEMICONDUCTOR SYSTEM INSPECTION TOOL AND METHODS OF OPERATION

DROPLET GENERATOR ASSEMBLY AND METHOD OF REPLACING COMPONENTS

EUV PHOTOLITHOGRAPHY SYSTEM FUEL SOURCE AND METHODS OF OPERATING TH...