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INTERLAYER DIELECTRIC LAYER
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Publication number 20230369106
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Publication date Nov 16, 2023
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Joung-Wei Liou
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H01 - BASIC ELECTRIC ELEMENTS
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HARDENED INTERLAYER DIELECTRIC LAYER
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Publication number 20220367380
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Publication date Nov 17, 2022
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Joung-Wei LIOU
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H01 - BASIC ELECTRIC ELEMENTS
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SPACER SCHEME AND METHOD FOR MRAM
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Publication number 20220209101
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Publication date Jun 30, 2022
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Joung-Wei Liou
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H01 - BASIC ELECTRIC ELEMENTS
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SPACER SCHEME AND METHOD FOR MRAM
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Publication number 20210098685
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Publication date Apr 1, 2021
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Taiwan Semiconductor Manufacturing Co., LTD
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Joung-Wei Liou
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H01 - BASIC ELECTRIC ELEMENTS
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Photoresist and Method of Formation and Use
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Publication number 20200393763
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Publication date Dec 17, 2020
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Taiwan Semiconductor Manfacturing Co., Ltd.
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Keng-Chu Lin
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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WAFER PROCESSING METHOD
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Publication number 20200357612
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Publication date Nov 12, 2020
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Chien Kuo HUANG
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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INTERLAYER DIELECTRIC LAYER
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Publication number 20200006126
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Publication date Jan 2, 2020
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Joung-Wei Liou
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H01 - BASIC ELECTRIC ELEMENTS
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HARDENED INTERLAYER DIELECTRIC LAYER
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Publication number 20190096820
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Publication date Mar 28, 2019
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Joung-Wei LIOU
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H01 - BASIC ELECTRIC ELEMENTS
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PROCESS CHAMBER AND WAFER PROCESSING METHOD
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Publication number 20180308665
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Publication date Oct 25, 2018
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Chien Kuo HUANG
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Low-K Dielectric Layer and Porogen
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Publication number 20170148676
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Publication date May 25, 2017
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Joung-Wei Liou
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H01 - BASIC ELECTRIC ELEMENTS
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Photoresist and Method of Formation and Use
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Publication number 20160259246
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Publication date Sep 8, 2016
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Taiwan Semiconductor Manufaturing Company, Ltd.
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Keng-Chu Lin
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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