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Joung Woo Lee
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Singapore, SG
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last 30 patents
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Patent Grant
Coolant and a method to control the pH and resistivity of coolant u...
Patent number
11,125,512
Issue date
Sep 21, 2021
Applied Materials, Inc.
Jianqi Wang
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Grant
In-situ chamber cleaning for an RTP chamber
Patent number
8,821,643
Issue date
Sep 2, 2014
Applied Materials, Inc.
Balasubramanian Ramachandran
B08 - CLEANING
Patents Applications
last 30 patents
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Patent Application
COOLANT AND A METHOD TO CONTROL THE PH AND RESISTIVITY OF COOLANT U...
Publication number
20170307310
Publication date
Oct 26, 2017
Applied Materials, Inc.
Jianqi WANG
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Application
IN-SITU CHAMBER CLEANING FOR AN RTP CHAMBER
Publication number
20130178072
Publication date
Jul 11, 2013
BALASUBRAMANIAN RAMACHANDRAN
B08 - CLEANING
Information
Patent Application
IN-SITU CHAMBER CLEANING FOR AN RTP CHAMBER
Publication number
20080115808
Publication date
May 22, 2008
APPLIED MATERIALS, INC.
Balasubramanian Ramachandran
B08 - CLEANING