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Patents Grantslast 30 patents

  • Information Patent Grant

    Ceramic heater
    • Patent number 12,120,783
    • Issue date Oct 15, 2024
    • NGK Insulators, Ltd.
    • Hiroshi Takebayashi
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Wafer placement apparatus
    • Patent number 11,784,078
    • Issue date Oct 10, 2023
    • NGK Insulators, Ltd.
    • Joyo Ito
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Member for semiconductor manufacturing apparatus and method for man...
    • Patent number 11,784,068
    • Issue date Oct 10, 2023
    • NGK Insulators, Ltd.
    • Hiroshi Takebayashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Electrostatic chuck heater
    • Patent number 11,600,510
    • Issue date Mar 7, 2023
    • NGK Insulators, Ltd.
    • Joyo Ito
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents