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Patents Grantslast 30 patents

Information Patent Grant
Member for semiconductor manufacturing apparatus and method for man...
- Patent number 12,243,729
- Issue date Mar 4, 2025
- NGK Insulators, Ltd.
- Hiroshi Takebayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor-manufacturing apparatus member and method of manufact...
- Patent number 12,238,826
- Issue date Feb 25, 2025
- NGK Insulators, Ltd.
- Hiroshi Takebayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ceramic heater
- Patent number 12,120,783
- Issue date Oct 15, 2024
- NGK Insulators, Ltd.
- Hiroshi Takebayashi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Wafer placement apparatus
- Patent number 11,784,078
- Issue date Oct 10, 2023
- NGK Insulators, Ltd.
- Joyo Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Member for semiconductor manufacturing apparatus and method for man...
- Patent number 11,784,068
- Issue date Oct 10, 2023
- NGK Insulators, Ltd.
- Hiroshi Takebayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck heater
- Patent number 11,600,510
- Issue date Mar 7, 2023
- NGK Insulators, Ltd.
- Joyo Ito
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR MAN...
- Publication number 20230125679
- Publication date Apr 27, 2023
- NGK Insulators, Ltd.
- Hiroshi TAKEBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR MAN...
- Publication number 20220246451
- Publication date Aug 4, 2022
- NGK Insulators, Ltd.
- Hiroshi TAKEBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR-MANUFACTURING APPARATUS MEMBER AND METHOD OF MANUFACT...
- Publication number 20220189812
- Publication date Jun 16, 2022
- NGK Insulators, Ltd.
- Hiroshi TAKEBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CERAMIC HEATER
- Publication number 20220110190
- Publication date Apr 7, 2022
- NGK Insulators, Ltd.
- Hiroshi TAKEBAYASHI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
ELECTROSTATIC CHUCK HEATER
- Publication number 20210242064
- Publication date Aug 5, 2021
- NGK Insulators, Ltd.
- Joyo ITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER PLACEMENT APPARATUS
- Publication number 20200286755
- Publication date Sep 10, 2020
- NGK Insulators, Ltd.
- Joyo ITO
- H01 - BASIC ELECTRIC ELEMENTS