Jozef Kudela

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Nishinomiya, JP

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Patents Grantslast 30 patents

Information Patent Grant
Remote inductively coupled plasma source for CVD chamber cleaning
- Patent number 8,075,734
- Issue date Dec 13, 2011
- Applied Materials, Inc.
- Carl A. Sorensen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
REMOTE INDUCTIVELY COUPLED PLASMA SOURCE FOR CVD CHAMBER CLEANING
- Publication number 20090008239
- Publication date Jan 8, 2009
- CARL A. SORENSEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLEANING MEANS FOR LARGE AREA PECVD DEVICES USING A REMOTE PLASMA S...
- Publication number 20080035169
- Publication date Feb 14, 2008
- OC OERLIKON BALZERS AG
- Filippos Farmakis
- B08 - CLEANING