Jörg Frederik Blumrich

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Jena, DE

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for examining an element of a photolithographi...
- Patent number 10,386,297
- Issue date Aug 20, 2019
- Carl Zeiss SMT GmbH
- Jörg Frederik Blumrich
- G01 - MEASURING TESTING
Information Patent Grant
Method for localizing defects on substrates
- Patent number 10,108,085
- Issue date Oct 23, 2018
- Carl Zeiss SMT GmbH
- Jan Hendrik Peters
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR EXAMINING AN ELEMENT OF A PHOTOLITHOGRAPHI...
- Publication number 20180164207
- Publication date Jun 14, 2018
- Carl Zeiss SMT GMBH
- Jörg Frederik Blumrich
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR PRODUCING A MASK FOR THE EXTREME ULTRAVIOLET WAVELENGTH...
- Publication number 20170176851
- Publication date Jun 22, 2017
- Carl Zeiss SMT GMBH
- Jan-Hendrik Peters
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...