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Jérôme Beauvisage
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Lans-en-Vercors, FR
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Process for producing monosilane from dichlorosilane
Patent number
8,871,168
Issue date
Oct 28, 2014
L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
Isao Abe
C01 - INORGANIC CHEMISTRY