JU-HONG CHA

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Busan, KR

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Patents Grantslast 30 patents

Information Patent Grant
Inductively coupled plasma processing apparatus
- Patent number 11,735,396
- Issue date Aug 22, 2023
- Samsung Electronics Co., Ltd.
- Seung Bo Shim
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
INDUCTIVELY COUPLED PLASMA PROCESSING APPARATUS
- Publication number 20220005671
- Publication date Jan 6, 2022
- Pusan National University Industry-University Coop
- SEUNG BO SHIM
- H01 - BASIC ELECTRIC ELEMENTS