Ju Yong JANG

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Gyeonggi-do, KR

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for inspecting electrostatic chuck
- Patent number 12,181,504
- Issue date Dec 31, 2024
- Semes Co., Ltd.
- Su Hyung Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment apparatus and method
- Patent number 11,964,309
- Issue date Apr 23, 2024
- Semes Co., Ltd.
- Sung Hun Eom
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TREATMENT APPARATUS AND METHOD
- Publication number 20230071392
- Publication date Mar 9, 2023
- SEMES CO., LTD.
- Sung Hun EOM
- B08 - CLEANING
Information Patent Application
APPARATUS AND METHOD FOR INSPECTING ELECTROSTATIC CHUCK
- Publication number 20230032518
- Publication date Feb 2, 2023
- SEMES CO., LTD.
- Su Hyung LEE
- H01 - BASIC ELECTRIC ELEMENTS