Juan Carlos ROCHA-ALVAREZ

Person

San Carlos, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Semiconductor substrate support leveling apparatus
- Patent number 12,131,934
- Issue date Oct 29, 2024
- Applied Materials, Inc.
- Katherine Woo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Faceplate having a curved surface
- Patent number 12,110,590
- Issue date Oct 8, 2024
- Applied Materials, Inc.
- Shailendra Srivastava
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Bipolar esc with balanced RF impedance
- Patent number 12,094,748
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Jian Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Real time bias detection and correction for electrostatic chuck
- Patent number 12,080,584
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Jian Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Actively cooled foreline trap to reduce throttle valve drift
- Patent number 12,060,637
- Issue date Aug 13, 2024
- Applied Materials, Inc.
- Gaosheng Fu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Bipolar electrostatic chuck to limit DC discharge
- Patent number 12,057,339
- Issue date Aug 6, 2024
- Applied Materials, Inc.
- Jian Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-pressure bipolar electrostatic chucking
- Patent number 12,040,210
- Issue date Jul 16, 2024
- Applied Materials, Inc.
- Jian Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing chambers and methods for cleaning the same
- Patent number 11,952,660
- Issue date Apr 9, 2024
- Applied Materials, Inc.
- Nitin Pathak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hardware to prevent bottom purge incursion in application volume an...
- Patent number 11,952,663
- Issue date Apr 9, 2024
- Applied Materials, Inc.
- Nitin Pathak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermally stable flow meters for precision fluid delivery
- Patent number 11,946,686
- Issue date Apr 2, 2024
- Applied Materials, Inc.
- Shailendra Srivastava
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
PECVD process
- Patent number 11,898,249
- Issue date Feb 13, 2024
- Applied Materials, Inc.
- Nagarajan Rajagopalan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High temperature bipolar electrostatic chuck
- Patent number 11,901,209
- Issue date Feb 13, 2024
- Applied Materials, Inc.
- Jian Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Faceplate having a curved surface
- Patent number 11,851,759
- Issue date Dec 26, 2023
- Applied Materials, Inc.
- Shailendra Srivastava
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Isolator apparatus and methods for substrate processing chambers
- Patent number 11,827,980
- Issue date Nov 28, 2023
- Applied Materials, Inc.
- Nitin Pathak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heated pedestal design for improved heat transfer and temperature u...
- Patent number 11,830,706
- Issue date Nov 28, 2023
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Power supply signal conditioning for an electrostatic chuck
- Patent number 11,776,835
- Issue date Oct 3, 2023
- Applied Materials, Inc.
- Zheng John Ye
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support assemblies and components
- Patent number 11,699,602
- Issue date Jul 11, 2023
- Applied Materials, Inc.
- Jian Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hardware to prevent bottom purge incursion in application volume an...
- Patent number 11,643,725
- Issue date May 9, 2023
- Applied Materials, Inc.
- Nitin Pathak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PECVD process
- Patent number 11,613,812
- Issue date Mar 28, 2023
- Applied Materials, Inc.
- Nagarajan Rajagopalan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Real time bias detection and correction for electrostatic chuck
- Patent number 11,594,440
- Issue date Feb 28, 2023
- Applied Materials, Inc.
- Jian Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High temperature bipolar electrostatic chuck
- Patent number 11,587,817
- Issue date Feb 21, 2023
- Applied Materials, Inc.
- Jian Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
External substrate system rotation in a semiconductor processing sy...
- Patent number 11,574,825
- Issue date Feb 7, 2023
- Applied Materials, Inc.
- Tuan Anh Nguyen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Faceplate having a curved surface
- Patent number 11,530,482
- Issue date Dec 20, 2022
- Applied Materials, Inc.
- Shailendra Srivastava
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing chamber and methods for cleaning the same
- Patent number 11,532,463
- Issue date Dec 20, 2022
- Applied Materials, Inc.
- Vishwas Kumar Pandey
- B08 - CLEANING
Information Patent Grant
Semiconductor substrate supports with improved high temperature chu...
- Patent number 11,501,993
- Issue date Nov 15, 2022
- Applied Materials, Inc.
- Jian Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Isolator apparatus and methods for substrate processing chambers
- Patent number 11,492,705
- Issue date Nov 8, 2022
- Applied Materials, Inc.
- Nitin Pathak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for providing maintenance access to electronic...
- Patent number 11,456,197
- Issue date Sep 27, 2022
- Applied Materials, Inc.
- Michael R. Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heated ceramic faceplate
- Patent number 11,434,568
- Issue date Sep 6, 2022
- Applied Materials, Inc.
- Juan Carlos Rocha-Alvarez
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film stack overlay improvement
- Patent number 11,339,475
- Issue date May 24, 2022
- Applied Materials, Inc.
- Xinhai Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma corrision resistive heater for high temperature processing
- Patent number 11,299,805
- Issue date Apr 12, 2022
- Applied Materials, Inc.
- Abdul Aziz Khaja
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
CERAMIC SYNTHESIS THROUGH SURFACE COATING OF POWDERS
- Publication number 20240327300
- Publication date Oct 3, 2024
- Applied Materials, Inc.
- Nitin Deepak
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
APPARATUS AND METHODS FOR CONTROLLING SUBSTRATE TEMPERATURE DURING...
- Publication number 20240312770
- Publication date Sep 19, 2024
- Applied Materials, Inc.
- Jian LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BIPOLAR ELECTROSTATIC CHUCK ELECTRODE DESIGNS
- Publication number 20240249924
- Publication date Jul 25, 2024
- Applied Materials, Inc.
- Jian Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING CHAMBERS AND METHODS FOR CLEANING THE SAME
- Publication number 20240247371
- Publication date Jul 25, 2024
- Applied Materials, Inc.
- Nitin Pathak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FARADAY FACEPLATE
- Publication number 20240145252
- Publication date May 2, 2024
- Applied Materials, Inc.
- Rutvij Naik
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FACEPLATE HAVING A CURVED SURFACE
- Publication number 20240044000
- Publication date Feb 8, 2024
- Applied Materials, Inc.
- Shailendra SRIVASTAVA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HARDWARE TO PREVENT BOTTOM PURGE INCURSION IN APPLICATION VOLUME AN...
- Publication number 20230392259
- Publication date Dec 7, 2023
- Applied Materials, Inc.
- Nitin Pathak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RADIO FREQUENCY SOURCE FOR INDUCTIVELY COUPLED AND CAPACITIVELY COU...
- Publication number 20230317411
- Publication date Oct 5, 2023
- Applied Materials, Inc.
- Abdul Aziz Khaja
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PIXELATED SHOWERHEAD FOR RF SENSITIVE PROCESSES
- Publication number 20230307228
- Publication date Sep 28, 2023
- Applied Materials, Inc.
- Abdul Aziz Khaja
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REAL TIME BIAS DETECTION AND CORRECTION FOR ELECTROSTATIC CHUCK
- Publication number 20230207372
- Publication date Jun 29, 2023
- Applied Materials, Inc.
- Jian Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH TEMPERATURE BIPOLAR ELECTROSTATIC CHUCK
- Publication number 20230207371
- Publication date Jun 29, 2023
- Applied Materials, Inc.
- Jian Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PECVD PROCESS
- Publication number 20230193466
- Publication date Jun 22, 2023
- Applied Materials, Inc.
- Nagarajan RAJAGOPALAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EXTERNAL SUBSTRATE SYSTEM ROTATION IN A SEMICONDUCTOR PROCESSING SY...
- Publication number 20230162999
- Publication date May 25, 2023
- Applied Materials, Inc.
- Tuan Anh NGUYEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FACEPLATE HAVING A CURVED SURFACE
- Publication number 20230123089
- Publication date Apr 20, 2023
- APPLIED MATERIALS, INC.
- Shailendra SRIVASTAVA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BIPOLAR ESC WITH BALANCED RF IMPEDANCE
- Publication number 20230054444
- Publication date Feb 23, 2023
- Applied Materials, Inc.
- Jian Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ISOLATOR APPARATUS AND METHODS FOR SUBSTRATE PROCESSING CHAMBERS
- Publication number 20230047451
- Publication date Feb 16, 2023
- Applied Materials, Inc.
- Nitin PATHAK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-ZONE HEATER WITH MINIMUM RF LOSS
- Publication number 20230011261
- Publication date Jan 12, 2023
- Applied Materials, Inc.
- Jian Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GROUND PATH SYSTEMS FOR PROVIDING A SHORTER AND SYMMETRICAL GROUND...
- Publication number 20220403520
- Publication date Dec 22, 2022
- Applied Materials, Inc.
- Tuan Anh NGUYEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT APPARATUS, METHODS, AND SYSTEMS HAVING ELEVATED S...
- Publication number 20220351951
- Publication date Nov 3, 2022
- Applied Materials, Inc.
- Jian LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HARDWARE TO PREVENT BOTTOM PURGE INCURSION IN APPLICATION VOLUME AN...
- Publication number 20220307135
- Publication date Sep 29, 2022
- Applied Materials, Inc.
- Nitin Pathak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS FOR HIGH RF POWER PROCESS
- Publication number 20220181120
- Publication date Jun 9, 2022
- Applied Materials, Inc.
- Jun MA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ACTIVELY COOLED FORELINE TRAP TO REDUCE THROTTLE VALVE DRIFT
- Publication number 20220170151
- Publication date Jun 2, 2022
- Applied Materials, Inc.
- Gaosheng Fu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BIPOLAR ELECTROSTATIC CHUCK TO LIMIT DC DISCHARGE
- Publication number 20220130704
- Publication date Apr 28, 2022
- Applied Materials, Inc.
- Jian Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING CHAMBER TO ACCOMMODATE PARASITIC PLASMA FO...
- Publication number 20220130713
- Publication date Apr 28, 2022
- Applied Materials, Inc.
- Khokan Chandra Paul
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH HEAT LOSS HEATER AND ELECTROSTATIC CHUCK FOR SEMICONDUCTOR PRO...
- Publication number 20220127723
- Publication date Apr 28, 2022
- Applied Materials, Inc.
- Jian Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH TEMPERATURE BIPOLAR ELECTROSTATIC CHUCK
- Publication number 20220122875
- Publication date Apr 21, 2022
- Applied Materials, Inc.
- Jian Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-PRESSURE BIPOLAR ELECTROSTATIC CHUCKING
- Publication number 20220122873
- Publication date Apr 21, 2022
- Applied Materials, Inc.
- Jian Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REAL TIME BIAS DETECTION AND CORRECTION FOR ELECTROSTATIC CHUCK
- Publication number 20220122874
- Publication date Apr 21, 2022
- Applied Materials, Inc.
- Jian Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR SUBSTRATE SUPPORT LEVELING APPARATUS
- Publication number 20220108907
- Publication date Apr 7, 2022
- Applied Materials, Inc.
- Katherine Woo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POWER SUPPLY SIGNAL CONDITIONING FOR AN ELECTROSTATIC CHUCK
- Publication number 20220102179
- Publication date Mar 31, 2022
- Applied Materials, Inc.
- Zheng John Ye
- H01 - BASIC ELECTRIC ELEMENTS

Juan Carlos ROCHA-ALVAREZ

Person

Patents Grantslast 30 patents

Semiconductor substrate support leveling apparatus

Faceplate having a curved surface

Bipolar esc with balanced RF impedance

Real time bias detection and correction for electrostatic chuck

Actively cooled foreline trap to reduce throttle valve drift

Bipolar electrostatic chuck to limit DC discharge

Multi-pressure bipolar electrostatic chucking

Semiconductor processing chambers and methods for cleaning the same

Hardware to prevent bottom purge incursion in application volume an...

Thermally stable flow meters for precision fluid delivery

PECVD process

High temperature bipolar electrostatic chuck

Faceplate having a curved surface

Isolator apparatus and methods for substrate processing chambers

Heated pedestal design for improved heat transfer and temperature u...

Power supply signal conditioning for an electrostatic chuck

Substrate support assemblies and components

Hardware to prevent bottom purge incursion in application volume an...

PECVD process

Real time bias detection and correction for electrostatic chuck

High temperature bipolar electrostatic chuck

External substrate system rotation in a semiconductor processing sy...

Faceplate having a curved surface

Semiconductor processing chamber and methods for cleaning the same

Semiconductor substrate supports with improved high temperature chu...

Isolator apparatus and methods for substrate processing chambers

Systems and methods for providing maintenance access to electronic...

Heated ceramic faceplate

Film stack overlay improvement

Plasma corrision resistive heater for high temperature processing

Patents Applicationslast 30 patents

CERAMIC SYNTHESIS THROUGH SURFACE COATING OF POWDERS

APPARATUS AND METHODS FOR CONTROLLING SUBSTRATE TEMPERATURE DURING...

BIPOLAR ELECTROSTATIC CHUCK ELECTRODE DESIGNS

SEMICONDUCTOR PROCESSING CHAMBERS AND METHODS FOR CLEANING THE SAME

FARADAY FACEPLATE

FACEPLATE HAVING A CURVED SURFACE

HARDWARE TO PREVENT BOTTOM PURGE INCURSION IN APPLICATION VOLUME AN...

RADIO FREQUENCY SOURCE FOR INDUCTIVELY COUPLED AND CAPACITIVELY COU...

PIXELATED SHOWERHEAD FOR RF SENSITIVE PROCESSES

REAL TIME BIAS DETECTION AND CORRECTION FOR ELECTROSTATIC CHUCK

HIGH TEMPERATURE BIPOLAR ELECTROSTATIC CHUCK

PECVD PROCESS

EXTERNAL SUBSTRATE SYSTEM ROTATION IN A SEMICONDUCTOR PROCESSING SY...

FACEPLATE HAVING A CURVED SURFACE

BIPOLAR ESC WITH BALANCED RF IMPEDANCE

ISOLATOR APPARATUS AND METHODS FOR SUBSTRATE PROCESSING CHAMBERS

MULTI-ZONE HEATER WITH MINIMUM RF LOSS

GROUND PATH SYSTEMS FOR PROVIDING A SHORTER AND SYMMETRICAL GROUND...

SUBSTRATE SUPPORT APPARATUS, METHODS, AND SYSTEMS HAVING ELEVATED S...

HARDWARE TO PREVENT BOTTOM PURGE INCURSION IN APPLICATION VOLUME AN...

SEMICONDUCTOR PROCESSING APPARATUS FOR HIGH RF POWER PROCESS

ACTIVELY COOLED FORELINE TRAP TO REDUCE THROTTLE VALVE DRIFT

BIPOLAR ELECTROSTATIC CHUCK TO LIMIT DC DISCHARGE

SEMICONDUCTOR PROCESSING CHAMBER TO ACCOMMODATE PARASITIC PLASMA FO...

HIGH HEAT LOSS HEATER AND ELECTROSTATIC CHUCK FOR SEMICONDUCTOR PRO...

HIGH TEMPERATURE BIPOLAR ELECTROSTATIC CHUCK

MULTI-PRESSURE BIPOLAR ELECTROSTATIC CHUCKING

REAL TIME BIAS DETECTION AND CORRECTION FOR ELECTROSTATIC CHUCK

SEMICONDUCTOR SUBSTRATE SUPPORT LEVELING APPARATUS

POWER SUPPLY SIGNAL CONDITIONING FOR AN ELECTROSTATIC CHUCK