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Juan Jose Hasbun Wood
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Bruckmuhl, DE
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last 30 patents
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Patent Grant
EUV radiation source, insert for an EUV radiation source and insert...
Patent number
11,550,225
Issue date
Jan 10, 2023
Carl Zeiss SMT GmbH
Iris Pilch
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
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Patent Application
INSERT FOR A SOURCE CHAMBER OF AN EUV RADIATION SOURCE
Publication number
20230019744
Publication date
Jan 19, 2023
Carl Zeiss SMT GMBH
Michael Hagg
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EUV RADIATION SOURCE, INSERT FOR AN EUV RADIATION SOURCE AND INSERT...
Publication number
20210382395
Publication date
Dec 9, 2021
Carl Zeiss SMT GMBH
Iris Pilch
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY