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Beijing, CN
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Patents Grants
last 30 patents
Information
Patent Grant
Magnetron drive mechanism, magnetron assembly and reaction chamber
Patent number
11,282,682
Issue date
Mar 22, 2022
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Qing She
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Mechanical chuck and plasma machining device
Patent number
10,344,374
Issue date
Jul 9, 2019
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Jue Hou
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
MAGNETRON DRIVE MECHANISM, MAGNETRON ASSEMBLY AND REACTION CHAMBER
Publication number
20200203135
Publication date
Jun 25, 2020
Beijing NAURA Microelectronics Equipment Co., Ltd.
Qing SHE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DEGASSING METHOD, DEGASSING CHAMBER, AND SEMICONDUCTOR PROCESSING A...
Publication number
20190218660
Publication date
Jul 18, 2019
Beijing NAURA Microelectronics Equipment Co., Ltd.
Hua YE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MECHANICAL CHUCK AND PLASMA MACHINING DEVICE
Publication number
20170044660
Publication date
Feb 16, 2017
Beijing NMC Co., Ltd.
Jue HOU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
BEARING DEVICE AND PLASMA PROCESSING APPARATUS
Publication number
20170011892
Publication date
Jan 12, 2017
Beijing NMC Co., Ltd.
Hao GUO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...