Juei-Wen Lin

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Tai-Chung City, TW

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for in-situ descum/hot bake/dry etch photoresi...
- Patent number 6,723,654
- Issue date Apr 20, 2004
- Taiwan Semiconductor Manufacturing Co., Ltd
- Kuei-Jen Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of etching a polysilicon layer during the stripping of the p...
- Patent number 6,489,227
- Issue date Dec 3, 2002
- Taiwan Semiconductor Manufacturing Company
- Tsung-Chi Hsieh
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for in-situ descum/hot bake/dry etch photoresi...
- Publication number 20020139775
- Publication date Oct 3, 2002
- Taiwan Semiconductor Manufacturing Co. Ltd.
- Kuei-Jen Chang
- H01 - BASIC ELECTRIC ELEMENTS