Juergen Fischer

Person

Heindenheim, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Arrangement for actuating an element in a microlithographic project...
- Patent number 10,185,221
- Issue date Jan 22, 2019
- Carl Zeiss SMT GmbH
- Sascha Bleidistel
- G02 - OPTICS
Information Patent Grant
Arrangement for actuating an element in a microlithographic project...
- Patent number 9,841,682
- Issue date Dec 12, 2017
- Carl Zeiss SMT GmbH
- Sascha Bleidistel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Arrangement for actuating an element in a microlithographic project...
- Patent number 9,568,837
- Issue date Feb 14, 2017
- Carl Zeiss SMT GmbH
- Sascha Bleidistel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus for microlithography for the producti...
- Patent number 9,513,562
- Issue date Dec 6, 2016
- Carl Zeiss SMT GmbH
- Juergen Fischer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Gravitation compensation for optical elements in projection exposur...
- Patent number 9,341,807
- Issue date May 17, 2016
- Carl Zeiss SMT GmbH
- Norbert Muehlberger
- G02 - OPTICS
Information Patent Grant
Arrangement for actuating an element in a microlithographic project...
- Patent number 9,304,404
- Issue date Apr 5, 2016
- Carl Zeiss SMT GmbH
- Juergen Fischer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Actuator including magnet for a projection exposure system and proj...
- Patent number 9,025,128
- Issue date May 5, 2015
- Carl Zeiss SMT GmbH
- Armin Werber
- G02 - OPTICS
Information Patent Grant
Projection exposure apparatus for microlithography for the producti...
- Patent number 8,885,143
- Issue date Nov 11, 2014
- Carl Zeiss SMT GmbH
- Juergen Fischer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Gravitation compensation for optical elements in projection exposur...
- Patent number 8,854,603
- Issue date Oct 7, 2014
- Carl Zeiss SMT GmbH
- Norbert Muehlberger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Arrangement for actuating an element in a microlithographic project...
- Patent number 8,786,826
- Issue date Jul 22, 2014
- Carl Zeiss SMT GmbH
- Sascha Bleidistel
- G02 - OPTICS
Information Patent Grant
Imaging device in a projection exposure facility
- Patent number 8,514,371
- Issue date Aug 20, 2013
- Carl Zeiss SMT GmbH
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system for illuminating a mask in a microlithographic...
- Patent number 8,416,390
- Issue date Apr 9, 2013
- Carl Zeiss SMT GmbH
- Markus Deguenther
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and device for controlling a plurality of actuators and an i...
- Patent number 8,102,506
- Issue date Jan 24, 2012
- Carl Zeiss SMT GmbH
- Thomas Rohe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imaging device in a projection exposure facility
- Patent number 7,961,294
- Issue date Jun 14, 2011
- Carl Zeiss SMT GmbH
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Immersion lithography objective
- Patent number 7,649,702
- Issue date Jan 19, 2010
- Carl Zeiss SMT AG
- Bernhard Gellrich
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Microlithographic projection exposure apparatus
- Patent number 7,570,343
- Issue date Aug 4, 2009
- Carl Zeis SMT AG
- Aurelian Dodoc
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection objective of a microlithographic projection exposure app...
- Patent number 7,545,482
- Issue date Jun 9, 2009
- Carl Zeiss SMT AG
- Juergen Fischer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imaging device in a projection exposure machine
- Patent number 7,486,382
- Issue date Feb 3, 2009
- Carl Zeiss SMT AG
- Stephan Back
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imaging device in a projection exposure facility
- Patent number 7,304,717
- Issue date Dec 4, 2007
- Carl Zelss SMT AG
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical element mount comprising an optical element holding frame
- Patent number 6,538,829
- Issue date Mar 25, 2003
- Carl-Zeiss-Stiftung
- Johannes Rau
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
ARRANGEMENT FOR ACTUATING AN ELEMENT IN A MICROLITHOGRAPHIC PROJECT...
- Publication number 20180181005
- Publication date Jun 28, 2018
- Carl Zeiss SMT GMBH
- Sascha Bleidistel
- G02 - OPTICS
Information Patent Application
ARRANGEMENT FOR ACTUATING AN ELEMENT IN A MICROLITHOGRAPHIC PROJECT...
- Publication number 20170153553
- Publication date Jun 1, 2017
- Carl Zeiss SMT GMBH
- Sascha Bleidistel
- G02 - OPTICS
Information Patent Application
ARRANGEMENT FOR ACTUATING AN ELEMENT IN A MICROLITHOGRAPHIC PROJECT...
- Publication number 20160054661
- Publication date Feb 25, 2016
- Carl Zeiss SMT GMBH
- Sascha Bleidistel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION EXPOSURE APPARATUS FOR MICROLITHOGRAPHY FOR THE PRODUCTI...
- Publication number 20150015864
- Publication date Jan 15, 2015
- Carl Zeiss SMT GMBH
- Juergen Fischer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
GRAVITATION COMPENSATION FOR OPTICAL ELEMENTS IN PROJECTION EXPOSUR...
- Publication number 20150009557
- Publication date Jan 8, 2015
- Carl Zeiss SMT GMBH
- Norbert Muehlberger
- G02 - OPTICS
Information Patent Application
ARRANGEMENT FOR ACTUATING AN ELEMENT IN A MICROLITHOGRAPHIC PROJECT...
- Publication number 20140300882
- Publication date Oct 9, 2014
- Sascha Bleidistel
- G02 - OPTICS
Information Patent Application
ARRANGEMENT FOR ACTUATING AN ELEMENT IN A MICROLITHOGRAPHIC PROJECT...
- Publication number 20140204356
- Publication date Jul 24, 2014
- Sascha Bleidistel
- G02 - OPTICS
Information Patent Application
ARRANGEMENT FOR ACTUATING AN ELEMENT IN A MICROLITHOGRAPHIC PROJECT...
- Publication number 20140043596
- Publication date Feb 13, 2014
- ASML NETHERLANDS B.V.
- Juergen Fischer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ACTUATOR INCLUDING MAGNET FOR A PROJECTION EXPOSURE SYSTEM AND PROJ...
- Publication number 20120008121
- Publication date Jan 12, 2012
- Carl Zeiss SMT GMBH
- Armin Werber
- G02 - OPTICS
Information Patent Application
GRAVITATION COMPENSATION FOR OPTICAL ELEMENTS IN PROJECTION EXPOSUR...
- Publication number 20110267596
- Publication date Nov 3, 2011
- Carl Zeiss SMT GMBH
- Norbert Muehlberger
- G02 - OPTICS
Information Patent Application
PROJECTION EXPOSURE APPARATUS FOR MICROLITHOGRAPHY FOR THE PRODUCTI...
- Publication number 20110235012
- Publication date Sep 29, 2011
- Carl Zeiss SMT GMBH
- Juergen Fischer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION SYSTEM FOR ILLUMINATING A MASK IN A MICROLITHOGRAPHIC...
- Publication number 20100060873
- Publication date Mar 11, 2010
- Carl Zeiss SMT AG
- Markus Deguenther
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION OBJECTIVE OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APP...
- Publication number 20090225296
- Publication date Sep 10, 2009
- Carl Zeiss SMT AG
- Juergen Fischer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Imaging Device in a Projection Exposure Machine
- Publication number 20090141258
- Publication date Jun 4, 2009
- Carl Zeiss SMT AG
- Stephan Back
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMAGING DEVICE IN A PROJECTION EXPOSURE FACILITY
- Publication number 20090040487
- Publication date Feb 12, 2009
- Carl Zeiss SMT AG
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and Device for Controlling a Plurality of Actuators and an I...
- Publication number 20090002668
- Publication date Jan 1, 2009
- Carl Zeiss SMT AG
- Thomas Rohe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMMERSION LITHOGRAPHY OBJECTIVE
- Publication number 20080212211
- Publication date Sep 4, 2008
- Carl Zeiss SMT AG
- Bernhard Gellrich
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION OBJECTIVE OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APP...
- Publication number 20070036494
- Publication date Feb 15, 2007
- Carl Zeiss SMT AG
- Juergen Fischer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Microlithographic projection exposure apparatus
- Publication number 20060187430
- Publication date Aug 24, 2006
- Carl Zeiss SMT AG
- Aurelian Dodoc
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Imaging device in a projection exposure machine
- Publication number 20060164619
- Publication date Jul 27, 2006
- Carl Zeiss SMT AG
- Stephan Back
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Optical element mount comprising an optical element holding frame
- Publication number 20020067555
- Publication date Jun 6, 2002
- Johannes Rau
- G02 - OPTICS

Juergen Fischer

Person

Patents Grantslast 30 patents

Arrangement for actuating an element in a microlithographic project...

Arrangement for actuating an element in a microlithographic project...

Arrangement for actuating an element in a microlithographic project...

Projection exposure apparatus for microlithography for the producti...

Gravitation compensation for optical elements in projection exposur...

Arrangement for actuating an element in a microlithographic project...

Actuator including magnet for a projection exposure system and proj...

Projection exposure apparatus for microlithography for the producti...

Gravitation compensation for optical elements in projection exposur...

Arrangement for actuating an element in a microlithographic project...

Imaging device in a projection exposure facility

Illumination system for illuminating a mask in a microlithographic...

Method and device for controlling a plurality of actuators and an i...

Imaging device in a projection exposure facility

Immersion lithography objective

Microlithographic projection exposure apparatus

Projection objective of a microlithographic projection exposure app...

Imaging device in a projection exposure machine

Imaging device in a projection exposure facility

Optical element mount comprising an optical element holding frame

Patents Applicationslast 30 patents

ARRANGEMENT FOR ACTUATING AN ELEMENT IN A MICROLITHOGRAPHIC PROJECT...

ARRANGEMENT FOR ACTUATING AN ELEMENT IN A MICROLITHOGRAPHIC PROJECT...

ARRANGEMENT FOR ACTUATING AN ELEMENT IN A MICROLITHOGRAPHIC PROJECT...

PROJECTION EXPOSURE APPARATUS FOR MICROLITHOGRAPHY FOR THE PRODUCTI...

GRAVITATION COMPENSATION FOR OPTICAL ELEMENTS IN PROJECTION EXPOSUR...

ARRANGEMENT FOR ACTUATING AN ELEMENT IN A MICROLITHOGRAPHIC PROJECT...

ARRANGEMENT FOR ACTUATING AN ELEMENT IN A MICROLITHOGRAPHIC PROJECT...

ARRANGEMENT FOR ACTUATING AN ELEMENT IN A MICROLITHOGRAPHIC PROJECT...

ACTUATOR INCLUDING MAGNET FOR A PROJECTION EXPOSURE SYSTEM AND PROJ...

GRAVITATION COMPENSATION FOR OPTICAL ELEMENTS IN PROJECTION EXPOSUR...

PROJECTION EXPOSURE APPARATUS FOR MICROLITHOGRAPHY FOR THE PRODUCTI...

ILLUMINATION SYSTEM FOR ILLUMINATING A MASK IN A MICROLITHOGRAPHIC...

PROJECTION OBJECTIVE OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APP...

Imaging Device in a Projection Exposure Machine

IMAGING DEVICE IN A PROJECTION EXPOSURE FACILITY

Method and Device for Controlling a Plurality of Actuators and an I...

IMMERSION LITHOGRAPHY OBJECTIVE

PROJECTION OBJECTIVE OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APP...

Microlithographic projection exposure apparatus

Imaging device in a projection exposure machine

Optical element mount comprising an optical element holding frame