Juergen Frosien

Person

Reimerling, DE

People

Patents Grantslast 30 patents

Information Patent Grant
System for inspecting and reviewing a sample
- Patent number 10,177,048
- Issue date Jan 8, 2019
- Applied Materials Israel Ltd.
- Juergen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for inspecting a sample using landing lens
- Patent number 9,297,692
- Issue date Mar 29, 2016
- Applied Materials Israel, Ltd.
- Yoram Uziel
- G01 - MEASURING TESTING
Information Patent Grant
Multi-beam scanning electron beam device and methods of using the same
- Patent number 9,153,413
- Issue date Oct 6, 2015
- Applied Materials Israel, Ltd.
- Gilad Almogy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ultra high precision measurement tool
- Patent number 8,785,849
- Issue date Jul 22, 2014
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnick mbH
- Juergen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High resolution gas field ion column with reduced sample load
- Patent number 8,735,847
- Issue date May 27, 2014
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Helmut Banzhof
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam optical component having a charged particle lens
- Patent number 8,445,846
- Issue date May 21, 2013
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Juergen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High resolution gas field ion column
- Patent number 8,158,939
- Issue date Apr 17, 2012
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Juergen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Achromatic mass separator
- Patent number 8,049,180
- Issue date Nov 1, 2011
- ICT, Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Juergen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual mode gas field ion source
- Patent number 8,026,492
- Issue date Sep 27, 2011
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Juergen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual mode gas field ion source
- Patent number 7,968,855
- Issue date Jun 28, 2011
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Juergen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle detection apparatus and detection method
- Patent number 7,947,953
- Issue date May 24, 2011
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Juergen Frosien
- G01 - MEASURING TESTING
Information Patent Grant
Arrangement and method for compensating emitter tip vibrations
- Patent number 7,939,800
- Issue date May 10, 2011
- ICT, Integrated Circuit Testing, Gesellschaft fur Halbleiterpruftechnik mbH
- Juergen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Energy filter for cold field emission electron beam apparatus
- Patent number 7,919,749
- Issue date Apr 5, 2011
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Fang Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ultra high precision measurement tool with control loop
- Patent number 7,851,768
- Issue date Dec 14, 2010
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Juergen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus and method for operating a charged...
- Patent number 7,838,830
- Issue date Nov 23, 2010
- ICT, Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Juergen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for in-situ sample preparation
- Patent number 7,829,870
- Issue date Nov 9, 2010
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Juergen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-function module for an electron beam column
- Patent number 7,800,075
- Issue date Sep 21, 2010
- Benyamin Buller
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Beam optical component for charged particle beams
- Patent number 7,675,042
- Issue date Mar 9, 2010
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Juergen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High current density particle beam system
- Patent number 7,663,102
- Issue date Feb 16, 2010
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Juergen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 7,629,578
- Issue date Dec 8, 2009
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Juergen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device with detection unit switch and method...
- Patent number 7,592,590
- Issue date Sep 22, 2009
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Jüergen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas field ION source for multiple applications
- Patent number 7,589,328
- Issue date Sep 15, 2009
- ICT, Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Juergen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device for high spatial resolution and multip...
- Patent number 7,544,937
- Issue date Jun 9, 2009
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
- Juergen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron anti-fogging baffle used as a detector
- Patent number 7,514,682
- Issue date Apr 7, 2009
- Applied Materials, Inc.
- Benyamin Buller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Aberration correction device and method for operating same
- Patent number 7,465,939
- Issue date Dec 16, 2008
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Juergen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Analyzing system and charged particle beam device
- Patent number 7,439,500
- Issue date Oct 21, 2008
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Juergen Frosien
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam column for writing shaped electron beams
- Patent number 7,427,765
- Issue date Sep 23, 2008
- Jeol, Ltd.
- Benyamin Buller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High current density particle beam system
- Patent number 7,335,894
- Issue date Feb 26, 2008
- ICT Integrated Circuit Testing Gesselschaft
- Juergen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic deflection system with low aberrations and vertical b...
- Patent number 7,315,029
- Issue date Jan 1, 2008
- Applied Materials, Inc.
- Dieter Winkler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic deflection system with impedance matching for high po...
- Patent number 7,227,155
- Issue date Jun 5, 2007
- Applied Materials, Inc.
- Benyamin Buller
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM FOR INSPECTING AND REVIEWING A SAMPLE
- Publication number 20160260642
- Publication date Sep 8, 2016
- APPLIED MATERIALS ISRAEL LTD.
- Juergen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR INSPECTING A SAMPLE USING LANDING LENS
- Publication number 20140231632
- Publication date Aug 21, 2014
- APPLIED MATERIALS ISRAEL, LTD.
- Yoram Uziel
- G02 - OPTICS
Information Patent Application
SECONDARY ELECTRON OPTICS AND DETECTION DEVICE
- Publication number 20140175277
- Publication date Jun 26, 2014
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
- Stefan Lanio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH THROUGHPUT SEM TOOL
- Publication number 20110163229
- Publication date Jul 7, 2011
- APPLIED MATERIALS ISRAEL, LTD.
- Juergen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH RESOLUTION GAS FIELD ION COLUMN
- Publication number 20100187436
- Publication date Jul 29, 2010
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- JUERGEN FROSIEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUAL MODE GAS FIELD ION SOURCE
- Publication number 20100108902
- Publication date May 6, 2010
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- JUERGEN FROSIEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE DETECTION APPARATUS AND DETECTION METHOD
- Publication number 20100084553
- Publication date Apr 8, 2010
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Juergen FROSIEN
- G01 - MEASURING TESTING
Information Patent Application
ULTRA HIGH PRECISION MEASUREMENT TOOL WITH CONTROL LOOP
- Publication number 20090289191
- Publication date Nov 26, 2009
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Juergen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ULTRA HIGH PRECISION MEASUREMENT TOOL
- Publication number 20090289185
- Publication date Nov 26, 2009
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Juergen FROSIEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUAL MODE GAS FIELD ION SOURCE
- Publication number 20090200484
- Publication date Aug 13, 2009
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Juergen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH RESOLUTION GAS FIELD ION COLUMN WITH REDUCED SAMPLE LOAD
- Publication number 20090146074
- Publication date Jun 11, 2009
- ICT Integrated Circuit Testing Gesellschaft fuer Halbleiterprueftechnik mbH
- Helmut BANZHOF
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ARRANGEMENT AND METHOD FOR COMPENSATING EMITTER TIP VIBRATIONS
- Publication number 20090001266
- Publication date Jan 1, 2009
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Juergen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-FUNCTION MODULE FOR AN ELECTRON BEAM COLUMN
- Publication number 20080308751
- Publication date Dec 18, 2008
- JEOL, Inc.
- Benyamin Buller
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS AND METHOD FOR OPERATING A CHARGED...
- Publication number 20080258060
- Publication date Oct 23, 2008
- JUERGEN FROSIEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Beam Optical Component Having a Charged Particle Lens
- Publication number 20080230694
- Publication date Sep 25, 2008
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Juergen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ACHROMATIC MASS SEPARATOR
- Publication number 20080185514
- Publication date Aug 7, 2008
- JUERGEN FROSIEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR IN-SITU SAMPLE PREPARATION
- Publication number 20080185517
- Publication date Aug 7, 2008
- Juergen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS FIELD ION SOURCE FOR MULTIPLE APPLICATIONS
- Publication number 20080142702
- Publication date Jun 19, 2008
- JUERGEN FROSIEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High Current Density Particle Beam System
- Publication number 20070284536
- Publication date Dec 13, 2007
- Juergen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20070194228
- Publication date Aug 23, 2007
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Juergen Frosien
- B82 - NANO-TECHNOLOGY
Information Patent Application
Aberration correction device and method for operating same
- Publication number 20070164228
- Publication date Jul 19, 2007
- Juergen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON ANTI-FOGGING BAFFLE USED AS A DETECTOR
- Publication number 20070145269
- Publication date Jun 28, 2007
- APPLIED MATERIALS, INC.
- BENYAMIN BULLER
- B82 - NANO-TECHNOLOGY
Information Patent Application
Chamber with low electron stimulated desorption
- Publication number 20070138404
- Publication date Jun 21, 2007
- Juergen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Beam optical component for charged particle beams
- Publication number 20070125954
- Publication date Jun 7, 2007
- Juergen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron beam column for writing shaped electron beams
- Publication number 20070085033
- Publication date Apr 19, 2007
- APPLIED MATERIALS, INC.
- Benyamin Buller
- B82 - NANO-TECHNOLOGY
Information Patent Application
Electrostatic deflection system with low aberrations and vertical b...
- Publication number 20070075262
- Publication date Apr 5, 2007
- APPLIED MATERIALS, INC.
- Dieter Winkler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrostatic deflection system with impedance matching for high po...
- Publication number 20070075256
- Publication date Apr 5, 2007
- Benyamin Buller
- B82 - NANO-TECHNOLOGY
Information Patent Application
Charged particle beam device with detection unit switch and method...
- Publication number 20060255268
- Publication date Nov 16, 2006
- Juergen Frosien
- B82 - NANO-TECHNOLOGY
Information Patent Application
Method and system for discharging a sample
- Publication number 20060255288
- Publication date Nov 16, 2006
- Applied Materials Israel Ltd.
- Igor Petrov
- G01 - MEASURING TESTING
Information Patent Application
Charged particle beam device for high spatial resolution and multip...
- Publication number 20060226360
- Publication date Oct 12, 2006
- Juergen Frosien
- H01 - BASIC ELECTRIC ELEMENTS

Juergen Frosien

Person

Patents Grantslast 30 patents

System for inspecting and reviewing a sample

System and method for inspecting a sample using landing lens

Multi-beam scanning electron beam device and methods of using the same

Ultra high precision measurement tool

High resolution gas field ion column with reduced sample load

Beam optical component having a charged particle lens

High resolution gas field ion column

Achromatic mass separator

Dual mode gas field ion source

Dual mode gas field ion source

Charged particle detection apparatus and detection method

Arrangement and method for compensating emitter tip vibrations

Energy filter for cold field emission electron beam apparatus

Ultra high precision measurement tool with control loop

Charged particle beam apparatus and method for operating a charged...

Method and apparatus for in-situ sample preparation

Multi-function module for an electron beam column

Beam optical component for charged particle beams

High current density particle beam system

Charged particle beam device

Charged particle beam device with detection unit switch and method...

Gas field ION source for multiple applications

Charged particle beam device for high spatial resolution and multip...

Electron anti-fogging baffle used as a detector

Aberration correction device and method for operating same

Analyzing system and charged particle beam device

Electron beam column for writing shaped electron beams

High current density particle beam system

Electrostatic deflection system with low aberrations and vertical b...

Electrostatic deflection system with impedance matching for high po...

Patents Applicationslast 30 patents

SYSTEM FOR INSPECTING AND REVIEWING A SAMPLE

SYSTEM AND METHOD FOR INSPECTING A SAMPLE USING LANDING LENS

SECONDARY ELECTRON OPTICS AND DETECTION DEVICE

HIGH THROUGHPUT SEM TOOL

HIGH RESOLUTION GAS FIELD ION COLUMN

DUAL MODE GAS FIELD ION SOURCE

CHARGED PARTICLE DETECTION APPARATUS AND DETECTION METHOD

ULTRA HIGH PRECISION MEASUREMENT TOOL WITH CONTROL LOOP

ULTRA HIGH PRECISION MEASUREMENT TOOL

DUAL MODE GAS FIELD ION SOURCE

HIGH RESOLUTION GAS FIELD ION COLUMN WITH REDUCED SAMPLE LOAD

ARRANGEMENT AND METHOD FOR COMPENSATING EMITTER TIP VIBRATIONS

MULTI-FUNCTION MODULE FOR AN ELECTRON BEAM COLUMN

CHARGED PARTICLE BEAM APPARATUS AND METHOD FOR OPERATING A CHARGED...

Beam Optical Component Having a Charged Particle Lens

ACHROMATIC MASS SEPARATOR

METHOD AND APPARATUS FOR IN-SITU SAMPLE PREPARATION

GAS FIELD ION SOURCE FOR MULTIPLE APPLICATIONS

High Current Density Particle Beam System

CHARGED PARTICLE BEAM DEVICE

Aberration correction device and method for operating same

ELECTRON ANTI-FOGGING BAFFLE USED AS A DETECTOR

Chamber with low electron stimulated desorption

Beam optical component for charged particle beams

Electron beam column for writing shaped electron beams

Electrostatic deflection system with low aberrations and vertical b...

Electrostatic deflection system with impedance matching for high po...

Charged particle beam device with detection unit switch and method...

Method and system for discharging a sample

Charged particle beam device for high spatial resolution and multip...