Juergen Huber

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Heidenheim, DE

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Patents Grantslast 30 patents

Information Patent Grant
Projection exposure apparatus for microlithography for the producti...
- Patent number 9,513,562
- Issue date Dec 6, 2016
- Carl Zeiss SMT GmbH
- Juergen Fischer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus for microlithography for the producti...
- Patent number 8,885,143
- Issue date Nov 11, 2014
- Carl Zeiss SMT GmbH
- Juergen Fischer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical apparatus and method for modifying the imaging behavior of...
- Patent number 8,169,595
- Issue date May 1, 2012
- Carl Zeiss SMT GmbH
- Martin Schriever
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
PROJECTION EXPOSURE APPARATUS FOR MICROLITHOGRAPHY FOR THE PRODUCTI...
- Publication number 20150015864
- Publication date Jan 15, 2015
- Carl Zeiss SMT GMBH
- Juergen Fischer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION EXPOSURE APPARATUS FOR MICROLITHOGRAPHY FOR THE PRODUCTI...
- Publication number 20110235012
- Publication date Sep 29, 2011
- Carl Zeiss SMT GMBH
- Juergen Fischer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL APPARATUS AND METHOD FOR MODIFYING THE IMAGING BEHAVIOR OF...
- Publication number 20090174876
- Publication date Jul 9, 2009
- Carl Zeiss SMT AG
- Martin Schriever
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY