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Juergen Knobloch
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Muenchen, DE
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last 30 patents
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Patent Grant
OPC method for generating corrected patterns for a phase-shifting m...
Patent number
6,664,010
Issue date
Dec 16, 2003
Infineon Technologies AG
Marco Ahrens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
OPC method for generating corrected patterns for a phase-shifting m...
Publication number
20020071997
Publication date
Jun 13, 2002
Infineon Techonologies AG
Marco Ahrens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY