Juergen Reich

Person

Campbell, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Monolithic optical beam splitter with focusing lens
- Patent number 9,664,909
- Issue date May 30, 2017
- KLA-Tencor Corporation
- Bret Whiteside
- G02 - OPTICS
Information Patent Grant
Inspection beam shaping for improved detection sensitivity
- Patent number 9,255,891
- Issue date Feb 9, 2016
- KLA-Tencor Corporation
- Christian Wolters
- G01 - MEASURING TESTING
Information Patent Grant
Illumination energy management in surface inspection
- Patent number 9,194,812
- Issue date Nov 24, 2015
- KLA-Tencor Corporation
- Christian Wolters
- F21 - LIGHTING
Information Patent Grant
Multi-spot defect inspection system
- Patent number 9,182,358
- Issue date Nov 10, 2015
- KLA-Tencor Corporation
- Zhiwei Xu
- G01 - MEASURING TESTING
Information Patent Grant
Surface scanning inspection system with independently adjustable sc...
- Patent number 9,116,132
- Issue date Aug 25, 2015
- KLA-Tencor Corporation
- Christian Wolters
- G01 - MEASURING TESTING
Information Patent Grant
Monitoring incident beam position in a wafer inspection system
- Patent number 8,934,091
- Issue date Jan 13, 2015
- KLA-Tencor Corp.
- Juergen Reich
- G01 - MEASURING TESTING
Information Patent Grant
Surface scanning inspection system with adjustable scan pitch
- Patent number 8,885,158
- Issue date Nov 11, 2014
- KLA-Tencor Corporation
- Christian Wolters
- G01 - MEASURING TESTING
Information Patent Grant
Illumination energy management in surface inspection
- Patent number 8,786,850
- Issue date Jul 22, 2014
- KLA-Tencor Corporation
- Christian Wolters
- F21 - LIGHTING
Information Patent Grant
Large particle detection for multi-spot surface scanning inspection...
- Patent number 8,755,044
- Issue date Jun 17, 2014
- KLA-Tencor Corporation
- Juergen Reich
- G01 - MEASURING TESTING
Information Patent Grant
Computer-implemented methods for inspecting and/or classifying a wafer
- Patent number 8,269,960
- Issue date Sep 18, 2012
- KLA-Tencor Corp.
- Juergen Reich
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for detecting pinholes in a film formed on a wa...
- Patent number 7,528,944
- Issue date May 5, 2009
- KLA-Tencor Technologies Corporation
- David Chen
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for determining drift in a position of a light...
- Patent number 7,511,816
- Issue date Mar 31, 2009
- KLA-Tencor Technologies Corp.
- Juergen Reich
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Surface Scanning Inspection System With Independently Adjustable Sc...
- Publication number 20150055128
- Publication date Feb 26, 2015
- KLA-Tencor Corporation
- Christian Wolters
- G01 - MEASURING TESTING
Information Patent Application
Illumination Energy Management in Surface Inspection
- Publication number 20140328043
- Publication date Nov 6, 2014
- Christian Wolters
- G01 - MEASURING TESTING
Information Patent Application
Multi-Spot Defect Inspection System
- Publication number 20140268118
- Publication date Sep 18, 2014
- KLA-Tencor Corporation
- Zhiwei Xu
- G01 - MEASURING TESTING
Information Patent Application
Inspection Beam Shaping For Improved Detection Sensitivity
- Publication number 20140139829
- Publication date May 22, 2014
- Christian Wolters
- G01 - MEASURING TESTING
Information Patent Application
Illumination Energy Management in Surface Inspection
- Publication number 20140118729
- Publication date May 1, 2014
- KLA-Tencor Corporation
- Christian Wolters
- G01 - MEASURING TESTING
Information Patent Application
Monitoring Incident Beam Position in a Wafer Inspection System
- Publication number 20140071437
- Publication date Mar 13, 2014
- KLA-Tencor Corporation
- Juergen Reich
- G01 - MEASURING TESTING
Information Patent Application
Large Particle Detection For Multi-Spot Surface Scanning Inspection...
- Publication number 20130050689
- Publication date Feb 28, 2013
- KLA-Tencor Corporation
- Juergen Reich
- G01 - MEASURING TESTING
Information Patent Application
Surface Scanning Inspection System With Adjustable Scan Pitch
- Publication number 20120229802
- Publication date Sep 13, 2012
- KLA-Tencor Corporation
- Christian Wolters
- G01 - MEASURING TESTING
Information Patent Application
COMPUTER-IMPLEMENTED METHODS FOR INSPECTING AND/OR CLASSIFYING A WAFER
- Publication number 20100060888
- Publication date Mar 11, 2010
- KLA-Tencor Corporation
- Juergen Reich
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND SYSTEMS FOR DETECTING PINHOLES IN A FILM FORMED ON A WA...
- Publication number 20080018887
- Publication date Jan 24, 2008
- David Chen
- G01 - MEASURING TESTING
Information Patent Application
Methods and systems for determining drift in a position of a light...
- Publication number 20060285112
- Publication date Dec 21, 2006
- Juergen Reich
- G01 - MEASURING TESTING

Juergen Reich

Person

Patents Grantslast 30 patents

Monolithic optical beam splitter with focusing lens

Inspection beam shaping for improved detection sensitivity

Illumination energy management in surface inspection

Multi-spot defect inspection system

Surface scanning inspection system with independently adjustable sc...

Monitoring incident beam position in a wafer inspection system

Surface scanning inspection system with adjustable scan pitch

Illumination energy management in surface inspection

Large particle detection for multi-spot surface scanning inspection...

Computer-implemented methods for inspecting and/or classifying a wafer

Methods and systems for detecting pinholes in a film formed on a wa...

Methods and systems for determining drift in a position of a light...

Patents Applicationslast 30 patents

Surface Scanning Inspection System With Independently Adjustable Sc...

Illumination Energy Management in Surface Inspection

Multi-Spot Defect Inspection System

Inspection Beam Shaping For Improved Detection Sensitivity

Illumination Energy Management in Surface Inspection

Monitoring Incident Beam Position in a Wafer Inspection System

Large Particle Detection For Multi-Spot Surface Scanning Inspection...

Surface Scanning Inspection System With Adjustable Scan Pitch

COMPUTER-IMPLEMENTED METHODS FOR INSPECTING AND/OR CLASSIFYING A WAFER

METHODS AND SYSTEMS FOR DETECTING PINHOLES IN A FILM FORMED ON A WA...

Methods and systems for determining drift in a position of a light...