Juhee YEO

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Suwon, KR

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Patents Grantslast 30 patents

Information Patent Grant
Nitride etchant composition and method
- Patent number 12,152,187
- Issue date Nov 26, 2024
- Entegris, Inc.
- Eric Hong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compositions and methods for selectively etching silicon nitride films
- Patent number 12,012,540
- Issue date Jun 18, 2024
- Entegris, Inc.
- Steven M. Bilodeau
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and composition for etching molybdenum
- Patent number 11,492,709
- Issue date Nov 8, 2022
- Entegris, Inc.
- Atanu K. Das
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
NITRIDE ETCHANT COMPOSITION AND METHOD
- Publication number 20250019590
- Publication date Jan 16, 2025
- Entegris, Inc.
- Eric Hong
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
COMPOSITION AND METHOD FOR SELECTIVELY ETCHING SILICON NITRIDE
- Publication number 20240309272
- Publication date Sep 19, 2024
- Entegris, Inc.
- Juhee Yeo
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
ETCHANT COMPOSITION AND METHOD
- Publication number 20230383185
- Publication date Nov 30, 2023
- Entegris, Inc.
- JeongYeol Yang
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
METHOD AND COMPOSITION FOR ETCHING MOLYBDENUM
- Publication number 20230030323
- Publication date Feb 2, 2023
- Entegris, Inc.
- Atanu K. Das
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITIONS AND METHODS FOR SELECTIVELY ETCHING SILICON NITRIDE FILMS
- Publication number 20220389314
- Publication date Dec 8, 2022
- Entegris, Inc.
- Steven M. Bilodeau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE REMOVAL OF METAL OXIDE HARD MASKS
- Publication number 20220208553
- Publication date Jun 30, 2022
- Entegris, Inc.
- SeungHyun Chae
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NITRIDE ETCHANT COMPOSITION AND METHOD
- Publication number 20220049160
- Publication date Feb 17, 2022
- Entegris, Inc.
- Eric HONG
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
METHOD AND COMPOSITION FOR ETCHING MOLYBDENUM
- Publication number 20210324525
- Publication date Oct 21, 2021
- Entegris, Inc.
- Atanu K. DAS
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Nitride etchant composition and method

Compositions and methods for selectively etching silicon nitride films

Method and composition for etching molybdenum

Patents Applicationslast 30 patents

NITRIDE ETCHANT COMPOSITION AND METHOD

COMPOSITION AND METHOD FOR SELECTIVELY ETCHING SILICON NITRIDE

ETCHANT COMPOSITION AND METHOD

METHOD AND COMPOSITION FOR ETCHING MOLYBDENUM

COMPOSITIONS AND METHODS FOR SELECTIVELY ETCHING SILICON NITRIDE FILMS

SELECTIVE REMOVAL OF METAL OXIDE HARD MASKS

NITRIDE ETCHANT COMPOSITION AND METHOD

METHOD AND COMPOSITION FOR ETCHING MOLYBDENUM