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Juhyen LEE
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Suwon-si, KR
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last 30 patents
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Patent Grant
Hardmask composition, method of forming pattern by using the hardma...
Patent number
10,685,844
Issue date
Jun 16, 2020
Samsung Electronics Co., Ltd.
Sangwon Kim
B82 - NANO-TECHNOLOGY
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last 30 patents
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Patent Application
HARDMASK COMPOSITION, METHOD OF FORMING PATTERN BY USING THE HARDMA...
Publication number
20190035635
Publication date
Jan 31, 2019
Samsung Electronics Co., Ltd.
Sangwon KIM
B82 - NANO-TECHNOLOGY