Jui-Chun Jui-Chen

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Taipei City, TW

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Patents Applicationslast 30 patents

Information Patent Application
METHOD OF FABRICATING MEMS DEVICES HAVING A PLURALITY OF CAVITIES
- Publication number 20150104895
- Publication date Apr 16, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shyh-Wei Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY