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Jui-Ling Tang
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Chiayi City, TW
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Patents Grants
last 30 patents
Information
Patent Grant
Buffer apparatus and thin film deposition system
Patent number
8,328,938
Issue date
Dec 11, 2012
United Microelectronics Corp.
Cheng-Chung Lim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of cleaning turbo pump and chamber/turbo pump clean process
Patent number
8,277,567
Issue date
Oct 2, 2012
United Microelectronics Corp.
Kian-Soong Poh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of cleaning turbo pump and chamber/turbo pump clean process
Patent number
8,021,492
Issue date
Sep 20, 2011
United Microelectronics Corp.
Kian-Soong Poh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for cleaning semiconductor equipment
Patent number
7,931,752
Issue date
Apr 26, 2011
United Microelectronics Corp.
Chong-Tat Lee
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF CLEANING TURBO PUMP AND CHAMBER/TURBO PUMP CLEAN PROCESS
Publication number
20110284035
Publication date
Nov 24, 2011
United Microelectronics Corp.
Kian-Soong Poh
B08 - CLEANING
Information
Patent Application
METHOD FOR CLEANING SEMICONDUCTOR EQUIPMENT
Publication number
20100170530
Publication date
Jul 8, 2010
United Microelectronics Corp.
Chong-Tat Lee
B08 - CLEANING
Information
Patent Application
BUFFER APPARATUS AND THIN FILM DEPOSITION SYSTEM
Publication number
20100043701
Publication date
Feb 25, 2010
United Microelectronics Corp.
Cheng-Chung Lim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF CLEANING TURBO PUMP AND CHAMBER/TURBO PUMP CLEAN PROCESS
Publication number
20080295867
Publication date
Dec 4, 2008
United Microelectronics Corp.
Kian-Soong Poh
B08 - CLEANING
Information
Patent Application
CLEAN METHOD FOR VAPOR DEPOSITION PROCESS
Publication number
20080260946
Publication date
Oct 23, 2008
United Microelectronics Corp.
Hwee-Leong Tan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...