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Julia Svirchevski
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Santa Clara, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Pad-assisted electropolishing
Patent number
7,686,935
Issue date
Mar 30, 2010
Novellus Systems, Inc.
Steven T. Mayer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for HF-HF cleaning
Patent number
6,170,110
Issue date
Jan 9, 2001
Lam Research Corporation
Julia Svirchevski
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of HF-HF Cleaning
Patent number
6,093,254
Issue date
Jul 25, 2000
Lam Research Corporation
Julia Svirchevski
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Pad-assisted electropolishing
Publication number
20090277802
Publication date
Nov 12, 2009
Novellus Systems, Inc.
Steven T. Mayer
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Pad-assisted electropolishing
Publication number
20090266707
Publication date
Oct 29, 2009
Novellus Systems, Inc.
Steven T. Mayer
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Method for polishing copper on a workpiece surface
Publication number
20060255016
Publication date
Nov 16, 2006
Novellus Systems, Inc.
Julia Svirchevski
B24 - GRINDING POLISHING