Julien Augustin MONBEIG

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Hillsboro, OR, US

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Patents Applicationslast 30 patents

Information Patent Application
ETCH UNIFORMITY IMPROVEMENT IN RADICAL ETCH USING CONFINEMENT RING
- Publication number 20250140529
- Publication date May 1, 2025
- LAM RESEARCH CORPORATION
- Andreas Fischer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTIMIZING EDGE RADICAL FLUX IN A DOWNSTREAM PLASMA CHAMBER
- Publication number 20230298859
- Publication date Sep 21, 2023
- LAM RESEARCH CORPORATION
- Andrew Stratton BRAVO
- H01 - BASIC ELECTRIC ELEMENTS