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Patent Application
DRY ETCHING METHOD, METHOD FOR PRODUCING SEMICONDUCTOR ELEMENT, AND...
Publication number
20240282583
Publication date
Aug 22, 2024
Resonac Corporation
Jumpei IWASAKI
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
ETCHING GAS AND ETCHING METHOD
Publication number
20240153778
Publication date
May 9, 2024
Resonac Corporation
Jumpei IWASAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICE
Publication number
20230395389
Publication date
Dec 7, 2023
Resonac Corporation
Jumpei IWASAKI
H01 - BASIC ELECTRIC ELEMENTS