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Patents Grants
last 30 patents
Information
Patent Grant
Electrostatic chuck and semiconductor manufacturing apparatus
Patent number
11,830,755
Issue date
Nov 28, 2023
Toto Ltd.
Akihito Ono
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck and semiconductor manufacturing apparatus
Patent number
11,776,836
Issue date
Oct 3, 2023
Toto Ltd.
Akihito Ono
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck and semiconductor manufacturing apparatus
Patent number
11,756,820
Issue date
Sep 12, 2023
Toto Ltd.
Akihito Ono
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck
Patent number
10,964,579
Issue date
Mar 30, 2021
Toto Ltd.
Tetsuro Itoyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck
Patent number
10,923,382
Issue date
Feb 16, 2021
Toto Ltd.
Jumpei Uefuji
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck
Patent number
10,373,854
Issue date
Aug 6, 2019
Toto Ltd.
Jumpei Uefuji
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
ELECTROSTATIC CHUCK
Publication number
20230317495
Publication date
Oct 5, 2023
TOTO LTD.
Akihito ONO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK
Publication number
20230317493
Publication date
Oct 5, 2023
TOTO LTD.
Akihito ONO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK
Publication number
20230317494
Publication date
Oct 5, 2023
TOTO LTD.
Akihito ONO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK
Publication number
20230311258
Publication date
Oct 5, 2023
TOTO LTD.
Akihito ONO
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
ELECTROSTATIC CHUCK AND SEMICONDUCTOR MANUFACTURING APPARATUS
Publication number
20220310433
Publication date
Sep 29, 2022
TOTO LTD.
Akihito ONO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK AND SEMICONDUCTOR MANUFACTURING APPARATUS
Publication number
20220102183
Publication date
Mar 31, 2022
TOTO LTD.
Akihito ONO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK AND SEMICONDUCTOR MANUFACTURING APPARATUS
Publication number
20220102184
Publication date
Mar 31, 2022
TOTO LTD.
Akihito ONO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK AND SEMICONDUCTOR MANUFACTURING APPARATUS
Publication number
20220102181
Publication date
Mar 31, 2022
TOTO LTD.
Akihito ONO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK AND SEMICONDUCTOR MANUFACTURING APPARATUS
Publication number
20220102182
Publication date
Mar 31, 2022
TOTO LTD.
Akihito ONO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK
Publication number
20200286766
Publication date
Sep 10, 2020
TOTO LTD.
Tetsuro Itoyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK
Publication number
20190019715
Publication date
Jan 17, 2019
TOTO LTD.
Jumpei UEFUJI
B32 - LAYERED PRODUCTS
Information
Patent Application
ELECTROSTATIC CHUCK
Publication number
20180286732
Publication date
Oct 4, 2018
TOTO LTD.
Jumpei UEFUJI
H01 - BASIC ELECTRIC ELEMENTS