Jun Amano

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Saitama-ken, JP

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Patents Grantslast 30 patents

Information Patent Grant
Phase-shifting photomask blank, phase-shifting photomask, method fo...
- Patent number 6,689,515
- Issue date Feb 10, 2004
- Ulvac Coating Corporation
- Nobuyuki Yoshioka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Phase-shifting photomask blank, phase-shifting photomask, method fo...
- Patent number 6,228,541
- Issue date May 8, 2001
- Ulvac Coating Corporation
- Akihiko Isao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Phase-shifting photomask blank, phase-shifting photomask, method fo...
- Publication number 20010018154
- Publication date Aug 30, 2001
- Ulvac Coating Corporation
- Nobuyuki Yoshioka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...