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Jun-Cheng Ko
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Taichung, TW
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Patents Grants
last 30 patents
Information
Patent Grant
Self-aligned contact process implementing bias compensation etch en...
Patent number
6,861,362
Issue date
Mar 1, 2005
Lam Research Corporation
Jun-Cheng Ko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Contact structure using taper contact etching and polycide step
Patent number
6,211,557
Issue date
Apr 3, 2001
Vanguard International Semiconductor Corporation
Jun-Cheng Ko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
UV resist curing as an indirect means to increase SiN corner select...
Patent number
6,069,077
Issue date
May 30, 2000
Vanguard International Semiconductor Corporation
Daniel Hao-Tien Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Contact process using taper contact etching and polycide step
Patent number
5,915,198
Issue date
Jun 22, 1999
Vanguard International Semiconductor Corporation
Jun-Cheng Ko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Optimized dry etching procedure, using an oxygen containing ambient...
Patent number
5,854,135
Issue date
Dec 29, 1998
Vanguard International Semiconductor Corporation
Jun-Cheng Ko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Two step plasma etch method for forming self aligned contact
Patent number
5,817,579
Issue date
Oct 6, 1998
Vanguard International Semiconductor Corporation
Jun-Cheng Ko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming single sin layer as passivation film
Patent number
5,788,767
Issue date
Aug 4, 1998
Vanguard International Semiconductor Corporation
Jun-Cheng Ko
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Self-aligned contact process implementing bias compensation etch en...
Publication number
20050130334
Publication date
Jun 16, 2005
LAM RESEARCH CORPORATION
Jun-Cheng Ko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Self-aligned contact process implementing bias compensation etch en...
Publication number
20030000923
Publication date
Jan 2, 2003
Jun-Cheng Ko
H01 - BASIC ELECTRIC ELEMENTS