Jun Emoto

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Gas purge unit and load port apparatus
- Patent number 11,446,713
- Issue date Sep 20, 2022
- TDK Corporation
- Tadamasa Iwamoto
- B08 - CLEANING
Information Patent Grant
Gas purge unit and gas purge apparatus
- Patent number 10,512,948
- Issue date Dec 24, 2019
- TDK Corporation
- Tadamasa Iwamoto
- B08 - CLEANING
Information Patent Grant
Gas purge apparatus, load port apparatus, installation stand for pu...
- Patent number 9,929,033
- Issue date Mar 27, 2018
- TDK Corporation
- Jun Emoto
- B08 - CLEANING
Information Patent Grant
Gas purge unit, load port apparatus, and installation stand for pur...
- Patent number 9,833,817
- Issue date Dec 5, 2017
- TDK Corporation
- Mutsuo Sasaki
- B08 - CLEANING
Information Patent Grant
Gas purge unit, load port apparatus, and installation stand for pur...
- Patent number 9,786,531
- Issue date Oct 10, 2017
- TDK Corporation
- Mutsuo Sasaki
- B08 - CLEANING
Information Patent Grant
Pod and purge system using the same
- Patent number 9,543,177
- Issue date Jan 10, 2017
- TDK Corporation
- Toshihiko Miyajima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Load port unit and EFEM system
- Patent number 9,536,765
- Issue date Jan 3, 2017
- TDK Corporation
- Tadamasa Iwamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lid opening/closing system for closed container and substrate proce...
- Patent number 9,349,627
- Issue date May 24, 2016
- TDK Corporation
- Tsutomu Okabe
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Load port apparatus
- Patent number 9,153,468
- Issue date Oct 6, 2015
- TDK Corporation
- Jun Emoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Purge device and load port apparatus including the same
- Patent number 8,978,718
- Issue date Mar 17, 2015
- TDK Corporation
- Jun Emoto
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method of processing an object in a container and lid opening/closi...
- Patent number 8,302,637
- Issue date Nov 6, 2012
- TDK Corporation
- Tsutomu Okabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Closed container and control system for closed container
- Patent number 8,234,002
- Issue date Jul 31, 2012
- TDK Corporation
- Jun Emoto
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Pod clamping unit load port equipped with pod clamping unit and min...
- Patent number 7,927,058
- Issue date Apr 19, 2011
- TDK Corporation
- Toshihiko Miyajima
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Lid opening/closing system for closed container and substrate proce...
- Patent number 7,789,609
- Issue date Sep 7, 2010
- TDK Corporation
- Tsutomu Okabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pod clamping unit in pod opener, pod corresponding to pod clamping...
- Patent number 7,621,714
- Issue date Nov 24, 2009
- TDK Corporation
- Toshihiko Miyajima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer processing apparatus having wafer mapping function
- Patent number 6,795,202
- Issue date Sep 21, 2004
- TDK Corporation
- Jun Emoto
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
GAS PURGE UNIT AND THE LOAD PORT DEVICE
- Publication number 20230420272
- Publication date Dec 28, 2023
- TDK Corporation
- Tatsuhiro KOTSUGAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS PURGE UNIT AND LOAD PORT APPARATUS
- Publication number 20190168268
- Publication date Jun 6, 2019
- TDK CORPORATION
- Tadamasa IWAMOTO
- B08 - CLEANING
Information Patent Application
GAS PURGE APPARATUS, LOAD PORT APPARATUS, INSTALLATION STAND FOR PU...
- Publication number 20170025296
- Publication date Jan 26, 2017
- TDK Corporation
- Jun EMOTO
- B08 - CLEANING
Information Patent Application
GAS PURGE UNIT, LOAD PORT APPARATUS, AND INSTALLATION STAND FOR PUR...
- Publication number 20170025299
- Publication date Jan 26, 2017
- TDK Corporation
- Mutsuo SASAKI
- B08 - CLEANING
Information Patent Application
GAS PURGE UNIT AND GAS PURGE APPARATUS
- Publication number 20160207082
- Publication date Jul 21, 2016
- TDK Corporation
- Tadamasa IWAMOTO
- B08 - CLEANING
Information Patent Application
GAS PURGE UNIT, LOAD PORT APPARATUS, AND INSTALLATION STAND FOR PUR...
- Publication number 20160038982
- Publication date Feb 11, 2016
- TDK Corporation
- Mutsuo SASAKI
- B08 - CLEANING
Information Patent Application
POD AND PURGE SYSTEM USING THE SAME
- Publication number 20150243538
- Publication date Aug 27, 2015
- TDK Corporation
- Toshihiko Miyajima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOAD PORT APPARATUS
- Publication number 20150214078
- Publication date Jul 30, 2015
- TDK Corporation
- Tadamasa IWAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOAD PORT APPARATUS
- Publication number 20150194328
- Publication date Jul 9, 2015
- TDK Corporation
- Jun EMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOAD PORT UNIT AND EFEM SYSTEM
- Publication number 20140363258
- Publication date Dec 11, 2014
- TDK Corporation
- Tadamasa Iwamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LID OPENING/CLOSING SYSTEM FOR CLOSED CONTAINER, AND SUBSTRATE PROC...
- Publication number 20140157722
- Publication date Jun 12, 2014
- TDK Corporation
- Tadamasa Iwamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PURGE DEVICE AND LOAD PORT APPARATUS INCLUDING THE SAME
- Publication number 20130042945
- Publication date Feb 21, 2013
- TDK Corporation
- Jun Emoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOAD PORT APPARATUS
- Publication number 20130011223
- Publication date Jan 10, 2013
- TDK Corporation
- Jun Emoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LID OPENING/CLOSING SYSTEM FOR CLOSED CONTAINER AND SUBSTRATE PROCE...
- Publication number 20100290888
- Publication date Nov 18, 2010
- TDK Corporation
- Tsutomu Okabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLOSED CONTAINER AND CONTROL SYSTEM FOR CLOSED CONTAINER
- Publication number 20090211940
- Publication date Aug 27, 2009
- TDK Corporation
- Jun Emoto
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
LID OPENING/CLOSING SYSTEM FOR CLOSED CONTAINER AND SUBSTRATE PROCE...
- Publication number 20090035099
- Publication date Feb 5, 2009
- TDK Corporation
- Tsutomu Okabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PROCESSING AN OBJECT IN A CONTAINER AND LID OPENING/CLOSI...
- Publication number 20090035100
- Publication date Feb 5, 2009
- TDK Corporation
- Tsutomu OKABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POD CRAMPING UNIT, LOAD PORT EQUIPPED WITH POD CRAMPING UNIT AND MI...
- Publication number 20070231112
- Publication date Oct 4, 2007
- TDK Corporation
- Toshihiko Miyajima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pod clamping unit in pod opener, pod corresponding to pod clamping...
- Publication number 20050095098
- Publication date May 5, 2005
- TDK Corporation
- Toshihiko Miyajima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer processing apparatus having wafer mapping function
- Publication number 20040144933
- Publication date Jul 29, 2004
- TDK Corporation
- Jun Emoto
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Gas purge unit and load port apparatus

Gas purge unit and gas purge apparatus

Gas purge apparatus, load port apparatus, installation stand for pu...

Gas purge unit, load port apparatus, and installation stand for pur...

Gas purge unit, load port apparatus, and installation stand for pur...

Pod and purge system using the same

Load port unit and EFEM system

Lid opening/closing system for closed container and substrate proce...

Load port apparatus

Purge device and load port apparatus including the same

Method of processing an object in a container and lid opening/closi...

Closed container and control system for closed container

Pod clamping unit load port equipped with pod clamping unit and min...

Lid opening/closing system for closed container and substrate proce...

Pod clamping unit in pod opener, pod corresponding to pod clamping...

Wafer processing apparatus having wafer mapping function

Patents Applicationslast 30 patents

GAS PURGE UNIT AND THE LOAD PORT DEVICE

GAS PURGE UNIT AND LOAD PORT APPARATUS

GAS PURGE APPARATUS, LOAD PORT APPARATUS, INSTALLATION STAND FOR PU...

GAS PURGE UNIT, LOAD PORT APPARATUS, AND INSTALLATION STAND FOR PUR...

GAS PURGE UNIT AND GAS PURGE APPARATUS

GAS PURGE UNIT, LOAD PORT APPARATUS, AND INSTALLATION STAND FOR PUR...

POD AND PURGE SYSTEM USING THE SAME

LOAD PORT APPARATUS

LOAD PORT APPARATUS

LOAD PORT UNIT AND EFEM SYSTEM

LID OPENING/CLOSING SYSTEM FOR CLOSED CONTAINER, AND SUBSTRATE PROC...

PURGE DEVICE AND LOAD PORT APPARATUS INCLUDING THE SAME

LOAD PORT APPARATUS

LID OPENING/CLOSING SYSTEM FOR CLOSED CONTAINER AND SUBSTRATE PROCE...

CLOSED CONTAINER AND CONTROL SYSTEM FOR CLOSED CONTAINER

LID OPENING/CLOSING SYSTEM FOR CLOSED CONTAINER AND SUBSTRATE PROCE...

METHOD OF PROCESSING AN OBJECT IN A CONTAINER AND LID OPENING/CLOSI...

POD CRAMPING UNIT, LOAD PORT EQUIPPED WITH POD CRAMPING UNIT AND MI...

Pod clamping unit in pod opener, pod corresponding to pod clamping...

Wafer processing apparatus having wafer mapping function