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Ube-shi, Yamaguchi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing gas, storage container, and substrate processi...
- Patent number 11,447,697
- Issue date Sep 20, 2022
- Central Glass Company, Limited
- Akifumi Yao
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Method for purifying fluorine compound gas
- Patent number 10,926,211
- Issue date Feb 23, 2021
- Central Glass Company, Limited
- Akifumi Yao
- C01 - INORGANIC CHEMISTRY

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING GAS, STORAGE CONTAINER, AND SUBSTRATE PROCESSI...
- Publication number 20210054275
- Publication date Feb 25, 2021
- Central Glass Company, Limited
- Akifumi YAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Purifying Fluorine Compound Gas
- Publication number 20190046917
- Publication date Feb 14, 2019
- Central Glass Company, Limited
- Akifumi YAO
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Method for Purifying Fluorine Gas
- Publication number 20190047858
- Publication date Feb 14, 2019
- Central Glass Company, Limited
- Akifumi YAO
- H01 - BASIC ELECTRIC ELEMENTS