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Substrate support device
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Patent number 10,276,410
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Issue date Apr 30, 2019
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NHK Spring Co., Ltd.
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Toshihiro Tachikawa
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H01 - BASIC ELECTRIC ELEMENTS
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Heater unit
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Patent number 7,851,728
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Issue date Dec 14, 2010
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NHK Spring Co., Ltd.
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Jun Futakuchiya
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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Substrate supporting apparatus
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Patent number 7,503,980
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Issue date Mar 17, 2009
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NHK Spring Co., Ltd.
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Naoya Kida
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Heater unit
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Patent number 7,045,747
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Issue date May 16, 2006
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NHK Spring Co., Ltd.
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Jun Futakuchiya
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H01 - BASIC ELECTRIC ELEMENTS
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